Patents by Inventor Eric A. Seymour

Eric A. Seymour has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dual magnetron sputtering apparatus utilizing control means for delivering balanced power
    Patent number: 6972079
    Abstract: There is disclosed a dual magnetron sputtering apparatus that is comprised of a balancing circuit connected to the output of an ac power source that supplies ac power to at least two target materials such that the balancing circuit allows the power supply to deliver equal power to each target material. In those applications where there may be an erosion of one target material faster than the other, the balancing circuit allows the power supply to deliberately unbalance the power to at least one of the target materials to reduce power to the target to compensate for faster erosion of the target.
    Type: Grant
    Filed: June 25, 2003
    Date of Patent: December 6, 2005
    Assignee: Advanced Energy Industries Inc.
    Inventors: Eric A. Seymour, Annabelle Pratt
  • Dual magnetron sputtering apparatus utilizing control means for delivering balanced power
    Publication number: 20040262156
    Abstract: There is disclosed a dual magnetron sputtering apparatus that is comprised of a balancing circuit connected to the output of an ac power source that supplies ac power to at least two target materials such that the balancing circuit allows the power supply to deliver equal power to each target material. In those applications where there may be an erosion of one target material faster than the other, the balancing circuit allows the power supply to deliberately unbalance the power to at least one of the target materials to reduce power to the target to compensate for faster erosion of the target.
    Type: Application
    Filed: June 25, 2003
    Publication date: December 30, 2004
    Inventors: Eric A. Seymour, Annabelle Pratt