Patents by Inventor Eric Anthony Perozziello

Eric Anthony Perozziello has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanning capacitance sample preparation technique
    Patent number: 6599132
    Abstract: Currently semiconductor processing and device manufacturing relies heavily on continued scaling of critical dimensions for cost reduction and performance enhancement. In order to continue this scaling below 0.1 micron with acceptable manufacturing yields, reliable measurement of electrical charge distribution and the placement of dopants is essential, yet no conventional technique exists to obtain distortion-free cross-sectional images. An aspect of the invention relates to a technique for forming a precisely-located, substantially atomically smooth cross-section of a crystalline sample suitable for Scanning Capacitance Microscopy analysis. Another aspect of the invention provides a method for deconvolving Scanning Capacitance raw data into an accurate representation of electrical carrier distributions suitable for the higher resolution attainable with the new sample preparation technique.
    Type: Grant
    Filed: November 30, 1999
    Date of Patent: July 29, 2003
    Assignee: The Board of Trustees of the Leland Stanford Junior University
    Inventors: Eric Anthony Perozziello, Guanyuan Michael Yu