Abstract: Improvements in the design of a low mass wafer holder are disclosed. The improvements include the use of peripherally located, integral lips to space a wafer or other substrate above the base plate of the wafer holder. A uniform gap is thus provided between the wafer and the base plate, such as will temper rapid heat exchanges, allow gas to flow between the wafer and wafer holder during wafer pick-up, and keep the wafer holder thermally coupled with the wafer. At the same time, thermal disturbance from lip contact with the wafer is reduced. Gas flow during pick-up can be provided through radial channels in a wafer holder upper surface, or through backside gas passages. A thicker ring is provided at the wafer holder perimeter, and is provided in some embodiments as an independent piece to accommodate stresses accompanying thermal gradients. Self-centering mechanisms are provided to keep the wafer holder centered relative to a spider which is subject to differential thermal expansion.

Abstract: The present invention relates to a design and method of operation of an improved rotary piston engine. In particular, a preferred embodiment of the present invention is directed to a rotary engine with improved reliability, comprising a housing, having side portions and a peripheral portion defining a chamber, a rotor, disposed within the chamber, and at least one exhaust port in one of the side portions.

Abstract: The present invention relates to a design and method of operation of an improved rotary piston engine. In particular, a preferred embodiment of the present invention is directed to a rotary engine with improved reliability, comprising a housing, having side portions and a peripheral portion defining a chamber, a rotor, disposed within the chamber, and at least one exhaust port in one of the side portions.

Abstract: The present invention relates to a design and method of operation of an improved rotary piston engine. In particular, a preferred embodiment of the present invention is directed to a rotary engine with improved reliability, comprising a housing, having side portions and a peripheral portion defining a chamber, a rotor, disposed within the chamber, and at least one exhaust port in one of the side portions.

Abstract: A generally horizontally-oriented quartz CVD chamber is disclosed with front and rear chamber divider plates adjacent a centrally positioned susceptor and surrounding temperature control ring which divide the chamber into upper and lower regions. Improvement to the lifetime of CVD process components and related throughput improvements are disclosed. A getter plate for attracting some of the unused reactant gas is positioned downstream from the susceptor extending generally parallel to and spaced between the divider plate and the upper chamber wall. This getter plate also minimizes deposition on the chamber walls and improves the efficiency of a cleaning step. Reradiating elements are also located adjacent side walls of the chamber to heat cooler chamber wall areas. The getter plate and the reradiating elements plus the susceptor and surrounding ring are all made of solid chemical vapor deposited SiC to improve the life of the chamber.

Abstract: A radio frequency antenna arrangement for selective operation at orthogonal polarizations of electromagnetic radiation. The antenna arrangement comprises at least one radiating element, such as one or more antenna patches, each having a vertical polarization feed point and a horizontal polarization feed point. The arrangement also includes a vertical feeder circuit for coupling a radio frequency modulated electromagnetic signal to the vertical polarization feed point of the or each radiating element, a horizontal feeder circuit for coupling a radio frequency modulated electromagnetic signal to the horizontal polarization feed point of the or each radiating element and a terminating resistive load. A switch mechanism is provided for selectively coupling the electromagnetic signal to one of the horizontal feeder circuit or the vertical feeder circuit and for selectively coupling the load to the other of the horizontal feeder circuit or the vertical feeder circuit.