Patents by Inventor Eric (Bram) Britcher

Eric (Bram) Britcher has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Point of use mixing and aging system for chemicals used in a film forming apparatus
    Publication number: 20020127875
    Abstract: A method for forming a low k dielectric constant material over a substrate. According to one embodiment, the method includes combining, in a mixing apparatus fluidly coupled to a solution applicator, an organo silicate glass (OSG) precursor, a solvent and a surfactant with water and an acid catalyst to form a coating solution; aging the coating solution in the mixing apparatus to form an aged coating solution; transporting the aged coating solution to the solution applicator; and then applying the aged coating solution to the substrate with the applicator.
    Type: Application
    Filed: March 6, 2002
    Publication date: September 12, 2002
    Applicant: Applied Materials, Inc.
    Inventors: Timothy Weidman, Eric (Bram) Britcher, Todd Balisky