Abstract: A heat flux sensor comprising: an array of nanofilaments suspended with respect to a support, each nanofilament comprising an electrically conducting material, the array being able to be biased by an electric power source to circulate an electric current in each of the nanofilaments, at least one resonator of the nanoelectro-mechanical system (NEMS) type comprising: a beam consisting of a nanofilament forming a side of the array, an actuation device able to generate a vibration of the beam under the effect of an excitation signal, a detection device configured to measure a displacement of the beam during the vibration and emit an output signal having a resonance at the resonant frequency of the resonator, the resonant frequency depending on the intensity of the electric current flowing through the beam, a temperature variation of the array of heating nanofilaments induced by a variation in a characteristic of a fluid surrounding the array causing an intensity variation of the current flowing through the b

Abstract: The invention relates to a heat flux sensor including: a heating wire (1) including a material capable of being taken to a determined temperature by Joule effect, suited to being connected to an electrical source, a resonator (2) of nano electro mechanical system (NEMS) type including: a beam (20) suspended with respect to a support (21), an actuating device (22) capable of generating a vibration of said beam under the effect of an excitation signal, a detection device configured to measure a displacement of said beam in the course of said vibration and to emit an output signal having a resonance at the resonance frequency of the resonator, said resonance frequency depending on the temperature of the beam, wherein one end (20a) of the beam (20) is integral with the heating wire (1) so as to enable a conduction of heat from the heating wire to the beam, a variation in temperature of the heating wire induced by a variation in a characteristic of a fluid surrounding said wire causing a variation in the reson

Abstract: The invention relates to a method for analysing hydrocarbons, comprising: the implementation of a gas chromatography separation according to a first controlled temperature profile, to separate a sample into a plurality of analytes; the detection of at least one of said analytes by measurement of a variation of the resonance frequency of at least one resonator of nano-electromechanical system (NEMS) type covered with a functional layer made to vibrate at the resonance frequency thereof, under the effect of an adsorption or desorption of the analyte by the functional layer, said method being characterised in that the resonator is subjected to a second controlled temperature profile, lower than the first profile.

Abstract: A heat flux sensor comprising: an array of nanofilaments suspended with respect to a support, each nanofilament comprising an electrically conducting material, the array being able to be biased by an electric power source to circulate an electric current in each of the nanofilaments, at least one resonator of the nanoelectro-mechanical system (NEMS) type comprising: a beam consisting of a nanofilament forming a side of the array, an actuation device able to generate a vibration of the beam under the effect of an excitation signal, a detection device configured to measure a displacement of the beam during the vibration and emit an output signal having a resonance at the resonant frequency of the resonator, the resonant frequency depending on the intensity of the electric current flowing through the beam, a temperature variation of the array of heating nanofilaments induced by a variation in a characteristic of a fluid surrounding the array causing an intensity variation of the current flowing through the b

Abstract: The invention relates to a heat flux sensor including: a heating wire (1) including a material capable of being taken to a determined temperature by Joule effect, suited to being connected to an electrical source, a resonator (2) of nano electro mechanical system (NEMS) type including: a beam (20) suspended with respect to a support (21), an actuating device (22) capable of generating a vibration of said beam under the effect of an excitation signal, a detection device configured to measure a displacement of said beam in the course of said vibration and to emit an output signal having a resonance at the resonance frequency of the resonator, said resonance frequency depending on the temperature of the beam, wherein one end (20a) of the beam (20) is integral with the heating wire (1) so as to enable a conduction of heat from the heating wire to the beam, a variation in temperature of the heating wire induced by a variation in a characteristic of a fluid surrounding said wire causing a variation in the reson

Abstract: A device for analyzing a fluid, including a layer including a plurality of sensors of MEMS and/or NEMS type, a layer including a mechanism controlling the sensor and for processing information transmitted by the sensors, the control and processing mechanism being electrically connected to the detectors, and a layer positioned on the layer including the sensors on a side of a face including the sensors including a mechanism spatially and temporally distributing the fluid on the sensors.

Abstract: A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.

Abstract: Analyzer 1 for analyzing a fluid 3 containing at least one substance to be analyzed and at least one inflammable substance containing: a source of gas 9 to provide a flux of diluent gas, an injecting nozzle 11 for introducing samples of the fluid into the flux of diluent gas and for producing a gaseous flux, and a detector 7 for analyzing the gaseous flux, wherein: the source of gas is intended to deliver a flux of diluent gas containing a material capable of supporting the combustion of the inflammable substance, preferably to deliver a flux of air, the injection nozzle is configured so as to introduce into the diluent gas samples of the fluid such that the average volume fraction of the fluid in the gaseous flux is less than 1/2,000 and preferably less than 1/20,000, and the detector contains at least one microsensor for detecting the substance to be analyzed. Corresponding method.

Abstract: The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and

Abstract: A thermal flow sensor comprising at least one first element (2) suspended with respect to a support, said first suspended element (2) being of an electrically conductive material, first means (6) for biasing said suspended element (2) and first means (8) for measuring the variation of the electric voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first biasing means (6) are formed by an alternating current source the intensity of which provides heating of the first suspended element (2) by Joule effect.

Abstract: The invention relates to a gas analysis system comprising, from upstream to downstream: a module (SEP) for separating at least a portion of the species contained in the gas to be analysed, comprising at least one microcapillary column (GC) for gas phase chromatography, and a time-of-flight mass spectrometer (TOFMS) coupled to said separation module, said spectrometer comprising a ion source (MS1, MS2) adapted to ionise at least a portion of said species and to emit a ion beam, and a free-flight zone (MS4) for said ions, said mass spectrometer (TOFMS) being arranged in the volume of at least one substrate and comprising a micro-reflectron (R) arranged between the source (MS1, MS2) and the free-flight zone (MS4), a wall (R1) of said micro-reflectron comprising a layer made from a resistive material designed to be polarised between at least two regions so as to create a continuous electrostatic field gradient in said reflectron.

Abstract: The invention relates to a thermal flow sensor comprising: a support, at least one element intended to be vibrated relative to the support, suspension means for said vibrating element relative to the vibrating element, means for heating the vibrating element, means for electrostatic excitation of the vibrating element so as to vibrate it at its resonance frequency, piezoelectric gauges for detecting the resonance frequency variation of the vibrating element, the gauges forming means for heating the vibrating element by Joule effect and the suspension means comprising two beams formed by nanowires so as to reduce the heat losses from the vibrating element toward the support.

Abstract: A measuring system including: at least two electromechanical resonators each having a resonant frequency varying around an offload resonant frequency according to a physical quantity to be measured; at least one reading device connected to inputs of the resonators and configured to supply an excitation signal on the inputs; and a memory in which is recorded, for each resonator, offload resonance information relating to the offload resonant frequency of the resonator. Each reading device is configured to determine the resonant frequency of one or more resonators selected for reading by configuring at least one element of the reading device using the offload resonance information stored for each selected resonator.

Abstract: A device with a suspended beam and piezoresistive means of detecting displacement of the beam and a method of manufacturing the device are disclosed. The device comprises a support, a suspended beam, moving parallel to the plane of the support, and means of detecting displacement, comprising at least two piezoresistive strain gauges that are not in line with each other. The beam is suspended through detection means. The two gauges are located on two opposite lateral faces of the beam respectively.

Abstract: A gas analysis system includes a fluidic channel for flow of a gas to be analyzed, a detector in the channel and adapted for measuring interactions of the gas with the detector, the detector including a resonator of the electromechanical nanosystem (NEMS) type and a heating system for heating a part of the detector, an actuation device for vibrationally actuating the resonator according to an excitation signal applied to an input of the detector, a detection device adapted for providing an output electric signal representative of the vibrations of the resonator, a read-out device connected to an input of the detector and configured for simultaneously measuring, from the output signal of the detector, the change in resonance frequency and the change in amplitude of the vibrations at the resonance frequency of the resonator, and a processing device configured for determining from the changes a fluidic characteristic of the gas.

Abstract: The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least one piezoresistive stress gauge made of a doped semiconducting material, extending from the beam so as to detect a movement of said beam, the variation in the electrical resistance of said at least one gauge supplying an output signal; said network includes at least two groups of resonators, each group including at least two resonators having an identical empty resonance frequency, each group of resonators having an empty resonance frequency different from that of each other group; the resonators forming each group are connected in parallel; the groups of resonators forming said network are connected in parallel; said system includes a reading device designed to supply an excitation signal at the network input and

Abstract: Analyzer 1 for analyzing a fluid 3 containing at least one substance to be analyzed and at least one inflammable substance containing: a source of gas 9 to provide a flux of diluent gas, an injecting nozzle 11 for introducing samples of the fluid into the flux of diluent gas and for producing a gaseous flux, and a detector 7 for analyzing the gaseous flux, wherein: the source of gas is intended to deliver a flux of diluent gas containing a material capable of supporting the combustion of the inflammable substance, preferably to deliver a flux of air, the injection nozzle is configured so as to introduce into the diluent gas samples of the fluid such that the average volume fraction of the fluid in the gaseous flux is less than 1/2,000 and preferably less than 1/20,000, and the detector contains at least one microsensor for detecting the substance to be analyzed. Corresponding method.

Abstract: A thermal flow sensor comprising at least one first element (2) suspended with respect to a support, said first suspended element (2) being of an electrically conductive material, first means (6) for biasing said suspended element (2) and first means (8) for measuring the variation of the electric voltage at the terminals of the suspended element (2), said first suspended element (2) being formed by a nanowire and said first biasing means (6) are formed by an alternating current source the intensity of which provides heating of the first suspended element (2) by Joule effect.

Abstract: The invention relates to a gas analysis system comprising, from upstream to downstream: a module (SEP) for separating at least a portion of the species contained in the gas to be analysed, comprising at least one microcapillary column (GC) for gas phase chromatography, and a time-of-flight mass spectrometer (TOFMS) coupled to said separation module, said spectrometer comprising a ion source (MS1, MS2) adapted to ionise at least a portion of said species and to emit a ion beam, and a free-flight zone (MS4) for said ions, said mass spectrometer (TOFMS) being arranged in the volume of at least one substrate and comprising a micro-reflectron (R) arranged between the source (MS1, MS2) and the free-flight zone (MS4), a wall (R1) of said micro-reflectron comprising a layer made from a resistive material designed to be polarised between at least two regions so as to create a continuous electrostatic field gradient in said reflectron.

Abstract: A method of identifying an electronic or electromechanical system includes: applying at least one noise signal (u) as input to the system, applying an output signal of the system to a one-bit analog digital converter, acquiring a signal at the output of the converter, carrying out an estimation of the output of the system with aid of performing an estimation (?) of the impulse response of the system. The estimation (?) of the impulse response includes: iterative calculation of a plurality of nh elements (J0, . . . , Ji, . . . , Jnh?1) of a given criterion (J), each element including, respectively: at least one term of correlation between the signal at the output of the converter and the noise signal.