Abstract: A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.

Abstract: A method may include heating a substrate in a first chamber to a platen temperature, the heating comprising heating the substrate on a platen; measuring the platen temperature in the first chamber using a contact temperature measurement; transferring the substrate to a second chamber after the heating; and measuring a voltage decay after transferring the substrate to the second chamber, using an optical pyrometer to measure pyrometer voltage as a function of time.

Abstract: A system and method for reduced workpiece adhesion during removal from a semiconductor processing station. The system provides an electrostatic charge detector that measures the residual charge on an electrostatically clamped workpiece prior to removal from a processing station inside the semiconductor processing tool. One embodiment uses an algorithm that to predict when to remove the workpiece without electrostatic adhesion based upon the decay rate of the residual electrostatic charge (Q) on the workpiece. Other embodiments also provide for a processing station static charge buildup health check and an excessive static charge check on incoming workpieces.

Abstract: An apparatus for monitoring of an ion beam. The apparatus may include a processor; and a memory unit coupled to the processor, including a display routine, where the display routine operative on the processor to manage monitoring of the ion beam. The display routine may include a measurement processor to receive a plurality of spot beam profiles of the ion beam, the spot beam profiles collected during a fast scan of the ion beam and a slow mechanical scan of a detector, conducted simultaneously with the fast scan. The fast scan may comprise a plurality of scan cycles having a frequency of 10 Hz or greater along a fast scan direction, and the slow mechanical scan being performed in a direction parallel to the fast scan direction. The measurement processor may also send a display signal to display at least one set of information, derived from the plurality of spot beam profiles.

Abstract: An apparatus for monitoring of an ion beam. The apparatus may include a processor; and a memory unit coupled to the processor, including a display routine, where the display routine operative on the processor to manage monitoring of the ion beam. The display routine may include a measurement processor to receive a plurality of spot beam profiles of the ion beam, the spot beam profiles collected during a fast scan of the ion beam and a slow mechanical scan of a detector, conducted simultaneously with the fast scan. The fast scan may comprise a plurality of scan cycles having a frequency of 10 Hz or greater along a fast scan direction, and the slow mechanical scan being performed in a direction parallel to the fast scan direction. The measurement processor may also send a display signal to display at least one set of information, derived from the plurality of spot beam profiles.

Abstract: An apparatus for monitoring of an ion beam. The apparatus may include a processor; and a memory unit coupled to the processor, including a display routine, where the display routine operative on the processor to manage monitoring of the ion beam. The display routine may include a measurement processor to receive a plurality of spot beam profiles of the ion beam, the spot beam profiles collected during a fast scan of the ion beam and a slow mechanical scan of a detector, conducted simultaneously with the fast scan. The fast scan may comprise a plurality of scan cycles having a frequency of 10 Hz or greater along a fast scan direction, and the slow mechanical scan being performed in a direction parallel to the fast scan direction. The measurement processor may also send a display signal to display at least one set of information, derived from the plurality of spot beam profiles.

Abstract: A system and method for reduced workpiece adhesion during removal from a semiconductor processing station. The system provides an electrostatic charge detector that measures the residual charge on an electrostatically clamped workpiece prior to removal from a processing station inside the semiconductor processing tool. One embodiment uses an algorithm that to predict when to remove the workpiece without electrostatic adhesion based upon the decay rate of the residual electrostatic charge (Q) on the workpiece. Other embodiments also provide for a processing station static charge buildup health check and an excessive static charge check on incoming workpieces.

Abstract: A system and method for reducing particulate contamination during the loading and unloading of semiconductor substrates into a load lock chamber of a semiconductor processing tool. One sensor that measures the differential pressure between the inside of the load lock and the outside atmosphere is provided. The method uses an algorithm that predicts when to stop the load lock vent so that a small, positive, repeatable pressure burst is delivered each time the door opens. This algorithm will automatically adjust for changes in the vent rate and response times of system vent components.

Abstract: A system for distributing data that represents and can be converted into a physical object such as a printed photograph or three-dimensional “3D printed” object provides a variety of user controls to direct the flow of data and restrict the use of consumable supplies.

Abstract: A system and method for reducing particulate contamination during the loading and unloading of semiconductor substrates into a load lock chamber of a semiconductor processing tool. One sensor that measures the differential pressure between the inside of the load lock and the outside atmosphere is provided. The method uses an algorithm that predicts when to stop the load lock vent so that a small, positive, repeatable pressure burst is delivered each time the door opens. This algorithm will automatically adjust for changes in the vent rate and response times of system vent components.

Abstract: A system for distributing data that represents and can be converted into a physical object such as a printed photograph or three-dimensional “3D printed” object provides a variety of user controls to direct the flow of data and restrict the use of consumable supplies.

Abstract: A method for managing video news segments using a media asset management system includes collecting the video news segments, associating corresponding geospatial data with each video news segment, and creating a search thesaurus including search descriptors with cross-references therebetween. At least one respective search descriptor from the search thesaurus is associated with each video news segment. The method further includes storing each video news segment, its geospatial data and its at least one search descriptor on the media asset management system for later search and retrieval, such as by a news broadcasting organization. The search descriptors may be geospatial search descriptors that are cross-referenced in a hierarchical relationship.

Abstract: A method for managing video segments from an aerial sensor platform using a media asset management system includes collecting the video segments from the aerial sensor platform, associating corresponding geospatial data with each video segment, and creating a search thesaurus including search descriptors with cross-references therebetween. At least one respective search descriptor from the search thesaurus is associated with each video segment. The method further includes storing each video segment, its geospatial data and its at least one search descriptor on the media asset management system for later search and retrieval, such as by a surveillance organization. The search descriptors may be geospatial search descriptors that are cross-referenced in a hierarchical relationship.

Abstract: A method for managing fixed-area video segments from fixed-area security cameras using a media asset management system includes collecting the fixed-area video segments from the fixed-area security cameras, associating corresponding geospatial data with each fixed-area video segment, and creating a search thesaurus including search descriptors with cross-references therebetween. At least one respective search descriptor from the search thesaurus is associated with each fixed-area video segment. The method further includes storing each fixed-area video segment, its geospatial data and its at least one search descriptor on the media asset management system for later search and retrieval, such as by a security organization. The search descriptors may be geospatial search descriptors that are cross-referenced in a hierarchical relationship.