Patents by Inventor Eric Deng

Eric Deng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Low metal porous silica dielectric for integral circuit applications
    Publication number: 20050106376
    Abstract: The invention relates to the production of nanoporous silica dielectric films and to semiconductor devices and integrated circuits comprising these improved films. The nanoporous films of the invention are prepared using silicon containing pre-polymers and are prepared by a process that allows crosslinking at lowered gel temperatures by means of a metal-ion-free onium or nucleophile catalyst.
    Type: Application
    Filed: April 10, 2002
    Publication date: May 19, 2005
    Inventors: Roger Leung, Eric Deng, Songyuan Xie, Victor Lu