Patents by Inventor Eric F. Bouche

Eric F. Bouche has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Corona based charge voltage measurement
    Patent number: 7345306
    Abstract: A method of measuring electrical characteristics of a gate dielectric. The gate dielectric is local annealed by directing a highly localized energy source at the measurement area, such that the measurement area is brought to an annealing temperature while surrounding structures are not significantly heated. While heating the measurement area, a flow of a gas containing a percentage of hydrogen, deuterium, or water vapor at a flow rate is directed to the measurement area. A charge is inducted on the measurement area and the electrical characteristics of the gate dielectric are measured using non contact electrical probing.
    Type: Grant
    Filed: June 2, 2006
    Date of Patent: March 18, 2008
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Sergio Edelstein, Eric F. Bouche, Jianou Shi, Shiyou Pei, Xiafang Zhang
  • Corona based charge voltage measurement
    Patent number: 7098050
    Abstract: A method of measuring electrical characteristics of a gate dielectric. The gate dielectric is local annealed by directing a highly localized energy source at the measurement area, such that the measurement area is brought to an annealing temperature while surrounding structures are not significantly heated. While heating the measurement area, a flow of a gas containing a percentage of hydrogen, deuterium, or water vapor at a flow rate is directed to the measurement area. A charge is inducted on the measurement area and the electrical characteristics of the gate dielectric are measured using non contact electrical probing.
    Type: Grant
    Filed: October 27, 2004
    Date of Patent: August 29, 2006
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Sergio Edelstein, Eric F. Bouche, Jianou Shi, Shiyou Pei, Xiafang Zhang