Patents by Inventor Eric G. Liniger
Eric G. Liniger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240079266Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: ApplicationFiled: April 7, 2023Publication date: March 7, 2024Inventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Patent number: 11658062Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: GrantFiled: May 13, 2019Date of Patent: May 23, 2023Assignee: TESSERA LLCInventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Patent number: 10418277Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: GrantFiled: May 11, 2018Date of Patent: September 17, 2019Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Publication number: 20190267279Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: ApplicationFiled: May 13, 2019Publication date: August 29, 2019Inventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Patent number: 10309884Abstract: A method for predicting the electrical functionality of a semiconductor package, the method includes performing a first stiffness test for a first semiconductor package, receiving failure data for the first semiconductor package, the failure data includes results of an electrical test performed after the first semiconductor package is assembled on a printed circuit board, generating a database comprising results of the first stiffness test as a function of the failure data for the first semiconductor package, performing a second stiffness test for a second semiconductor package, identifying a unique result from the results of the first stiffness test in the database, the unique result aligns with a result of the second stiffness test, and predicting a failure data for the second semiconductor package based on the failure data for the first semiconductor package which corresponds to the unique result of the first stiffness test identified in the database.Type: GrantFiled: June 20, 2017Date of Patent: June 4, 2019Assignee: International Business Machines CorporationInventors: Stephen P. Ayotte, Eric G. Liniger, Travis S. Longenbach
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Patent number: 10115629Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: GrantFiled: October 20, 2017Date of Patent: October 30, 2018Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Publication number: 20180261494Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: ApplicationFiled: May 11, 2018Publication date: September 13, 2018Inventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Publication number: 20180047615Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: ApplicationFiled: August 9, 2016Publication date: February 15, 2018Inventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Publication number: 20180047617Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: ApplicationFiled: October 20, 2017Publication date: February 15, 2018Inventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Patent number: 9892961Abstract: Semiconductor devices having air gap spacers that are formed as part of BEOL or MOL layers of the semiconductor devices are provided, as well as methods for fabricating such air gap spacers. For example, a method comprises forming a first metallic structure and a second metallic structure on a substrate, wherein the first and second metallic structures are disposed adjacent to each other with insulating material disposed between the first and second metallic structures. The insulating material is etched to form a space between the first and second metallic structures. A layer of dielectric material is deposited over the first and second metallic structures using a pinch-off deposition process to form an air gap in the space between the first and second metallic structures, wherein a portion of the air gap extends above an upper surface of at least one of the first metallic structure and the second metallic structure.Type: GrantFiled: August 9, 2016Date of Patent: February 13, 2018Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Thomas J. Haigh, Juntao Li, Eric G. Liniger, Sanjay C. Mehta, Son V. Nguyen, Chanro Park, Tenko Yamashita
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Publication number: 20170284913Abstract: A method for predicting the electrical functionality of a semiconductor package, the method includes performing a first stiffness test for a first semiconductor package, receiving failure data for the first semiconductor package, the failure data includes results of an electrical test performed after the first semiconductor package is assembled on a printed circuit board, generating a database comprising results of the first stiffness test as a function of the failure data for the first semiconductor package, performing a second stiffness test for a second semiconductor package, identifying a unique result from the results of the first stiffness test in the database, the unique result aligns with a result of the second stiffness test, and predicting a failure data for the second semiconductor package based on the failure data for the first semiconductor package which corresponds to the unique result of the first stiffness test identified in the database.Type: ApplicationFiled: June 20, 2017Publication date: October 5, 2017Applicant: International Business Machines CorporationInventors: STEPHEN P. AYOTTE, ERIC G. LINIGER, TRAVIS S. LONGENBACH
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Patent number: 9772268Abstract: A method for predicting the electrical functionality of a semiconductor package, the method includes performing a first stiffness test for a first semiconductor package, receiving failure data for the first semiconductor package, the failure data includes results of an electrical test performed after the first semiconductor package is assembled on a printed circuit board, generating a database comprising results of the first stiffness test as a function of the failure data for the first semiconductor package, performing a second stiffness test for a second semiconductor package, identifying a unique result from the results of the first stiffness test in the database, the unique result aligns with a result of the second stiffness test, and predicting a failure data for the second semiconductor package based on the failure data for the first semiconductor package which corresponds to the unique result of the first stiffness test identified in the database.Type: GrantFiled: March 30, 2015Date of Patent: September 26, 2017Assignee: International Business Machines CorporationInventors: Stephen P. Ayotte, Eric G. Liniger, Travis S. Longenbach
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Patent number: 9613900Abstract: An interconnect structure includes a first dielectric material having an undercut region located at an upper surface thereof. A first conductive structure is located above a first area of the undercut region. The first conductive structure comprises a first conductive metal portion having a diffusion barrier portion located on one sidewall surface of the first conductive metal portion and having a metal liner located on another sidewall surface and a bottom surface of the first conductive metal portion. A second conductive structure is located above a second area of the undercut region. The second conductive structure comprises a second conductive material portion having a diffusion barrier portion located on one sidewall surface of the second conductive material portion and having a metal liner located on another sidewall surface and a bottom surface of the second conductive metal portion. A gap is located between the first and second conductive structures.Type: GrantFiled: February 1, 2016Date of Patent: April 4, 2017Assignee: International Business Machines CorporationInventors: Chih-Chao Yang, Stephan A. Cohen, Eric G. Liniger
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Publication number: 20160290905Abstract: A method for predicting the electrical functionality of a semiconductor package, the method includes performing a first stiffness test for a first semiconductor package, receiving failure data for the first semiconductor package, the failure data includes results of an electrical test performed after the first semiconductor package is assembled on a printed circuit board, generating a database comprising results of the first stiffness test as a function of the failure data for the first semiconductor package, performing a second stiffness test for a second semiconductor package, identifying a unique result from the results of the first stiffness test in the database, the unique result aligns with a result of the second stiffness test, and predicting a failure data for the second semiconductor package based on the failure data for the first semiconductor package which corresponds to the unique result of the first stiffness test identified in the database.Type: ApplicationFiled: March 30, 2015Publication date: October 6, 2016Inventors: Stephen P. Ayotte, Eric G. Liniger, Travis S. Longenbach
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Publication number: 20160148867Abstract: An interconnect structure includes a first dielectric material having an undercut region located at an upper surface thereof. A first conductive structure is located above a first area of the undercut region. The first conductive structure comprises a first conductive metal portion having a diffusion barrier portion located on one sidewall surface of the first conductive metal portion and having a metal liner located on another sidewall surface and a bottom surface of the first conductive metal portion. A second conductive structure is located above a second area of the undercut region. The second conductive structure comprises a second conductive material portion having a diffusion barrier portion located on one sidewall surface of the second conductive material portion and having a metal liner located on another sidewall surface and a bottom surface of the second conductive metal portion. A gap is located between the first and second conductive structures.Type: ApplicationFiled: February 1, 2016Publication date: May 26, 2016Inventors: Chih-Chao Yang, Stephan A. Cohen, Eric G. Liniger
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Patent number: 9281211Abstract: An interconnect structure includes a first dielectric material having an undercut region located at an upper surface thereof. A first conductive structure is located above a first area of the undercut region. The first conductive structure comprises a first conductive metal portion having a diffusion barrier portion located on one sidewall surface of the first conductive metal portion and having a metal liner located on another sidewall surface and a bottom surface of the first conductive metal portion. A second conductive structure is located above a second area of the undercut region. The second conductive structure comprises a second conductive material portion having a diffusion barrier portion located on one sidewall surface of the second conductive material portion and having a metal liner located on another sidewall surface and a bottom surface of the second conductive metal portion. A gap is located between the first and second conductive structures.Type: GrantFiled: February 10, 2014Date of Patent: March 8, 2016Assignee: International Business Machines CorporationInventors: Chih-Chao Yang, Stephan A. Cohen, Eric G. Liniger
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Publication number: 20150228572Abstract: An interconnect structure includes a first dielectric material having an undercut region located at an upper surface thereof. A first conductive structure is located above a first area of the undercut region. The first conductive structure comprises a first conductive metal portion having a diffusion barrier portion located on one sidewall surface of the first conductive metal portion and having a metal liner located on another sidewall surface and a bottom surface of the first conductive metal portion. A second conductive structure is located above a second area of the undercut region. The second conductive structure comprises a second conductive material portion having a diffusion barrier portion located on one sidewall surface of the second conductive material portion and having a metal liner located on another sidewall surface and a bottom surface of the second conductive metal portion. A gap is located between the first and second conductive structures.Type: ApplicationFiled: February 10, 2014Publication date: August 13, 2015Applicant: International Business Machines CorporationInventors: Chih-Chao Yang, Stephan A. Cohen, Eric G. Liniger
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Patent number: 9018089Abstract: A method of annealing a semiconductor and a semiconductor. The method of annealing including heating the semiconductor to a first temperature for a first period of time sufficient to remove physically-adsorbed water from the semiconductor and heating the semiconductor to a second temperature, the second temperature being greater than the first temperature, for a period of time sufficient to remove chemically-adsorbed water from the semiconductor. A semiconductor device including a plurality of metal conductors, and a dielectric including regions separating the plurality of metal conductors, the regions including an upper interface and a lower bulk region, the upper interface having a density greater than a density of the lower bulk region.Type: GrantFiled: August 30, 2011Date of Patent: April 28, 2015Assignee: International Business Machines CorporationInventors: Eric G. Liniger, Griselda Bonilla, Pak Leung, Stephen A. Cohen, Stephen M. Gates, Thomas M. Shaw
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Publication number: 20130049207Abstract: A method of annealing a semiconductor and a semiconductor. The method of annealing including heating the semiconductor to a first temperature for a first period of time sufficient to remove physically-adsorbed water from the semiconductor and heating the semiconductor to a second temperature, the second temperature being greater than the first temperature, for a period of time sufficient to remove chemically-adsorbed water from the semiconductor. A semiconductor device including a plurality of metal conductors, and a dielectric including regions separating the plurality of metal conductors, the regions including an upper interface and a lower bulk region, the upper interface having a density greater than a density of the lower bulk region.Type: ApplicationFiled: August 30, 2011Publication date: February 28, 2013Applicant: International Business Machines CorporationInventors: Eric G. Liniger, Griselda Bonilla, Pak Leung, Stephan A. Cohen, Stephen M. Gates, Thomas M. Shaw
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Patent number: 7998880Abstract: A low k dielectric stack having an effective dielectric constant k, of about 3.0 or less, in which the mechanical properties of the stack are improved by introducing at least one nanolayer into the dielectric stack. The improvement in mechanical properties is achieved without significantly increasing the dielectric constant of the films within the stack and without the need of subjecting the inventive dielectric stack to any post treatment steps. Specifically, the present invention provides a low k dielectric stack that comprises at least one low k dielectric material and at least one nanolayer present within the at least one low k dielectric material.Type: GrantFiled: July 30, 2007Date of Patent: August 16, 2011Assignees: International Business Machines Corporation, Sony CorporationInventors: Son V. Nguyen, Sarah L. Lane, Eric G. Liniger, Kensaku Ida, Darryl D. Restaino