Patents by Inventor Eric Georgelis
Eric Georgelis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7541558Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.Type: GrantFiled: December 11, 2006Date of Patent: June 2, 2009Assignee: MKS Instruments, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Publication number: 20070145018Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.Type: ApplicationFiled: December 11, 2006Publication date: June 28, 2007Applicant: MKS Instruments, Inc.Inventors: Donald Smith, Xing Chen, William Holber, Eric Georgelis
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Patent number: 7166816Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.Type: GrantFiled: May 3, 2004Date of Patent: January 23, 2007Assignee: MKS Instruments, Inc.Inventors: Xing Chen, William M. Holber, Andrew Barnett Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz
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Patent number: 7161112Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: GrantFiled: October 20, 2003Date of Patent: January 9, 2007Assignee: MKS Instruments, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 6815633Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.Type: GrantFiled: March 12, 2001Date of Patent: November 9, 2004Assignee: Applied Science & Technology, Inc.Inventors: Xing Chen, William M. Holber, Andrew Barnett Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz
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Publication number: 20040079287Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: ApplicationFiled: October 20, 2003Publication date: April 29, 2004Applicant: Applied Science & Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 6664497Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: GrantFiled: May 10, 2002Date of Patent: December 16, 2003Assignee: Applied Science and Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 6559408Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: GrantFiled: May 10, 2002Date of Patent: May 6, 2003Assignee: Applied Science & Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 6552296Abstract: An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.Type: GrantFiled: September 17, 2001Date of Patent: April 22, 2003Assignee: Applied Science and Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 6486431Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: GrantFiled: September 12, 2000Date of Patent: November 26, 2002Assignee: Applied Science & Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Publication number: 20020125225Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: ApplicationFiled: May 10, 2002Publication date: September 12, 2002Applicant: Applied Science & Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Publication number: 20020125226Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: ApplicationFiled: May 10, 2002Publication date: September 12, 2002Applicant: Applied Science & Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 6388226Abstract: An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.Type: GrantFiled: February 10, 2000Date of Patent: May 14, 2002Assignee: Applied Science and Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Publication number: 20020046991Abstract: An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.Type: ApplicationFiled: September 17, 2001Publication date: April 25, 2002Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 6150628Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primarily winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.Type: GrantFiled: June 26, 1997Date of Patent: November 21, 2000Assignee: Applied Science and Technology, Inc.Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
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Patent number: 4204948Abstract: In a moving matrix magnetic separator in which a matrix device moves relative to a processing device and a seal assembly seals a longitudinal section of the matrix device to an associated processing device, the seal assembly including a sealing surface on one of the devices and a seal on the other, the improvement comprising said seal including a base portion extending generally longitudinally in the direction of motion of the matrix device; first and second salient, resilient lip portions extending from the base portion toward an associated sealing surface in the gap between the matrix device and the processing device, and extending generally longitudinally to the direction of motion of the matrix device and spaced from each other transversely to the direction of motion of the matrix device and forming a channel therebetween; a pressurized purge fluid chamber formed by the channel and the associated sealing surface; and means for supplying purging fluid to the purge fluid chamber formed by the channel and liType: GrantFiled: December 18, 1978Date of Patent: May 27, 1980Assignee: Allis-Chalmers CorporationInventors: Ionel Wechsler, John A. Oberteuffer, John J. Nolan, Henry H. Kolm, Eric Georgelis, Bo R. Arvidson