Patents by Inventor Eric Georgelis

Eric Georgelis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7541558
    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.
    Type: Grant
    Filed: December 11, 2006
    Date of Patent: June 2, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Publication number: 20070145018
    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.
    Type: Application
    Filed: December 11, 2006
    Publication date: June 28, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Donald Smith, Xing Chen, William Holber, Eric Georgelis
  • Patent number: 7166816
    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.
    Type: Grant
    Filed: May 3, 2004
    Date of Patent: January 23, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Xing Chen, William M. Holber, Andrew Barnett Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz
  • Patent number: 7161112
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Grant
    Filed: October 20, 2003
    Date of Patent: January 9, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6815633
    Abstract: Apparatus for dissociating gases includes a plasma chamber comprising a gas. A first transformer having a first magnetic core surrounds a first portion of the plasma chamber and has a first primary winding. A second transformer having a second magnetic core surrounds a second portion of the plasma chamber and has a second primary winding. A first solid state AC switching power supply including one or more switching semiconductor devices is coupled to a first voltage supply and has a first output that is coupled to the first primary winding. A second solid state AC switching power supply including one or more switching semiconductor devices is coupled to a second voltage supply and has a second output that is coupled to the second primary winding. The first solid state AC switching power supply drives a first AC current in the first primary winding. The second solid state AC switching power supply drives a second AC current in the second primary winding.
    Type: Grant
    Filed: March 12, 2001
    Date of Patent: November 9, 2004
    Assignee: Applied Science & Technology, Inc.
    Inventors: Xing Chen, William M. Holber, Andrew Barnett Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz
  • Publication number: 20040079287
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Application
    Filed: October 20, 2003
    Publication date: April 29, 2004
    Applicant: Applied Science & Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6664497
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Grant
    Filed: May 10, 2002
    Date of Patent: December 16, 2003
    Assignee: Applied Science and Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6559408
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Grant
    Filed: May 10, 2002
    Date of Patent: May 6, 2003
    Assignee: Applied Science & Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6552296
    Abstract: An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.
    Type: Grant
    Filed: September 17, 2001
    Date of Patent: April 22, 2003
    Assignee: Applied Science and Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6486431
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Grant
    Filed: September 12, 2000
    Date of Patent: November 26, 2002
    Assignee: Applied Science & Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Publication number: 20020125225
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Application
    Filed: May 10, 2002
    Publication date: September 12, 2002
    Applicant: Applied Science & Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Publication number: 20020125226
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Application
    Filed: May 10, 2002
    Publication date: September 12, 2002
    Applicant: Applied Science & Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6388226
    Abstract: An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.
    Type: Grant
    Filed: February 10, 2000
    Date of Patent: May 14, 2002
    Assignee: Applied Science and Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Publication number: 20020046991
    Abstract: An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.
    Type: Application
    Filed: September 17, 2001
    Publication date: April 25, 2002
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 6150628
    Abstract: An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primarily winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
    Type: Grant
    Filed: June 26, 1997
    Date of Patent: November 21, 2000
    Assignee: Applied Science and Technology, Inc.
    Inventors: Donald K. Smith, Xing Chen, William M. Holber, Eric Georgelis
  • Patent number: 4204948
    Abstract: In a moving matrix magnetic separator in which a matrix device moves relative to a processing device and a seal assembly seals a longitudinal section of the matrix device to an associated processing device, the seal assembly including a sealing surface on one of the devices and a seal on the other, the improvement comprising said seal including a base portion extending generally longitudinally in the direction of motion of the matrix device; first and second salient, resilient lip portions extending from the base portion toward an associated sealing surface in the gap between the matrix device and the processing device, and extending generally longitudinally to the direction of motion of the matrix device and spaced from each other transversely to the direction of motion of the matrix device and forming a channel therebetween; a pressurized purge fluid chamber formed by the channel and the associated sealing surface; and means for supplying purging fluid to the purge fluid chamber formed by the channel and li
    Type: Grant
    Filed: December 18, 1978
    Date of Patent: May 27, 1980
    Assignee: Allis-Chalmers Corporation
    Inventors: Ionel Wechsler, John A. Oberteuffer, John J. Nolan, Henry H. Kolm, Eric Georgelis, Bo R. Arvidson