Patents by Inventor Eric Hildebrant

Eric Hildebrant has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flexural plate wave sensor
    Patent number: 7468138
    Abstract: A method for manufacturing a flexural plate wave sensor, the method including the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over said etch stop layer, depositing a piezoelectric layer over said membrane layer, forming a comb pattern with drive teeth which span across an entire length of the piezoelectric layer on said piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing a portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.
    Type: Grant
    Filed: July 31, 2006
    Date of Patent: December 23, 2008
    Assignee: The Charles Stark Draper Laboratory, Inc.
    Inventors: Marc S. Weinberg, Brian Cunningham, Eric Hildebrant
  • Flexural plate wave sensor
    Publication number: 20060260108
    Abstract: A method for manufacturing a flexural plate wave sensor, the method including the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over said etch stop layer, depositing a piezoelectric layer over said membrane layer, forming a comb pattern with drive teeth which span across an entire length of the piezoelectric layer on said piezoelectric layer, etching a cavity through the substrate, the cavity having substantially parallel interior walls, and removing a portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer.
    Type: Application
    Filed: July 31, 2006
    Publication date: November 23, 2006
    Inventors: Marc Weinberg, Brian Cunningham, Eric Hildebrant
  • Flexural plate wave sensor
    Patent number: 7109633
    Abstract: A flexural plate wave sensor including a flexural plate having a length and a width and a comb pattern over the flexural plate with drive teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexure plate wave sensor.
    Type: Grant
    Filed: September 30, 2003
    Date of Patent: September 19, 2006
    Assignee: Charles Stark Draper Laboratory, Inc.
    Inventors: Marc S. Weinberg, Brian Cunningham, Eric Hildebrant
  • Flexural plate wave sensor
    Publication number: 20050067920
    Abstract: A flexural plate wave sensor including a flexural plate having a length and a width and a comb pattern over the flexural plate with drive teeth disposed across the entire length of the flexural plate to reduce the number of eigenmodes excited in the plate and thereby simplifying the operation and design of the flexure plate wave sensor.
    Type: Application
    Filed: September 30, 2003
    Publication date: March 31, 2005
    Inventors: Marc Weinberg, Brian Cunningham, Eric Hildebrant