Patents by Inventor Eric Hong

Eric Hong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12272560
    Abstract: Compositions useful for the selective etching, i.e., removal, of metal oxide hard masks such as zirconium oxide and hafnium oxide, often used as hard masks in microelectronic devices, in the presence of other materials such as polysilicon, silicon dioxide, silicon nitride, and tungsten are provided.
    Type: Grant
    Filed: December 22, 2021
    Date of Patent: April 8, 2025
    Assignee: ENTEGRIS, INC.
    Inventors: SeungHyun Chae, SeongJin Hong, Eric Hong, Juhee Yeo, WonLae Kim, JeongYeol Yang
  • Publication number: 20250019590
    Abstract: Provided are compositions and methods for selectively etching titanium nitride, generally leaving molybdenum present unaffected by the process, as well as any aluminum oxide, silicon dioxide, and polysilicon which may be present on the device. In general, the compositions of the invention were able to achieve titanium nitride etch rates exceeding 3.5 ?/minute, thereby providing uniform recess top and bottom layers in patterns.
    Type: Application
    Filed: August 15, 2024
    Publication date: January 16, 2025
    Inventors: Eric Hong, SeongJin Hong, WonLae Kim, JeongYeol Yang, SeungHyun Chae, JuHee Yeo
  • Patent number: 12152187
    Abstract: Provided are compositions and methods for selectively etching titanium nitride, generally leaving molybdenum present unaffected by the process, as well as any aluminum oxide, silicon dioxide, and polysilicon which may be present on the device. In general, the compositions of the invention were able to achieve titanium nitride etch rates exceeding 3.5 ?/minute, thereby providing uniform recess top and bottom layers in patterns.
    Type: Grant
    Filed: August 13, 2021
    Date of Patent: November 26, 2024
    Assignee: ENTEGRIS, INC.
    Inventors: Eric Hong, SeongJin Hong, WonLae Kim, JeongYeol Yang, SeungHyun Chae, JuHee Yeo
  • Publication number: 20230030323
    Abstract: An etchant composition and method for etching molybdenum from a microelectronic device at an etch rate are described. A microelectronic device is contacted with an etchant composition for a time sufficient to at least partially remove the molybdenum. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base and has a pH of from 7.5 to 13. The etchant composition selectively removes molybdenum at an etch rate of 5-200 ?/min.
    Type: Application
    Filed: September 21, 2022
    Publication date: February 2, 2023
    Inventors: Atanu K. Das, Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang, Juhee Yeo, Michael L. White, SeongJin Hong, SeungHyun Chae, Steven A. Lippy, WonLae Kim
  • Patent number: 11492709
    Abstract: An etchant composition and method for etching molybdenum from a microelectronic device at an etch rate are described. A microelectronic device is contacted with an etchant composition for a time sufficient to at least partially remove the molybdenum. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base and has a pH of from 7.5 to 13. The etchant composition selectively removes molybdenum at an etch rate of 5-200 ?/min.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: November 8, 2022
    Assignee: ENTEGRIS, INC.
    Inventors: Atanu K. Das, Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang, Juhee Yeo, Michael L. White, SeongJin Hong, SeungHyun Chae, Steven A. Lippy, WonLae Kim
  • Publication number: 20220208553
    Abstract: Compositions useful for the selective etching, i.e., removal, of metal oxide hard masks such as zirconium oxide and hafnium oxide, often used as hard masks in microelectronic devices, in the presence of other materials such as polysilicon, silicon dioxide, silicon nitride, and tungsten are provided.
    Type: Application
    Filed: December 22, 2021
    Publication date: June 30, 2022
    Inventors: SeungHyun Chae, SeongJin Hong, Eric Hong, Juhee Yeo, WonLae Kim, JeongYeol Yang
  • Publication number: 20220049160
    Abstract: Provided are compositions and methods for selectively etching titanium nitride, generally leaving molybdenum present unaffected by the process, as well as any aluminum oxide, silicon dioxide, and polysilicon which may be present on the device. In general, the compositions of the invention were able to achieve titanium nitride etch rates exceeding 3.5 ?/minute, thereby providing uniform recess top and bottom layers in patterns.
    Type: Application
    Filed: August 13, 2021
    Publication date: February 17, 2022
    Inventors: Eric HONG, SeongJin HONG, WonLae KIM, JeongYeol YANG, SeungHyun CHAE, JuHee YEO
  • Publication number: 20220003790
    Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.
    Type: Application
    Filed: September 15, 2021
    Publication date: January 6, 2022
    Applicant: Abbott Point of Care Inc.
    Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
  • Patent number: 11156620
    Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.
    Type: Grant
    Filed: January 28, 2019
    Date of Patent: October 26, 2021
    Assignee: Abbott Point of Care Inc.
    Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha R K Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
  • Publication number: 20210324525
    Abstract: An etchant composition and method for etching molybdenum from a microelectronic device at an etch rate are described. A microelectronic device is contacted with an etchant composition for a time sufficient to at least partially remove the molybdenum. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base and has a pH of from 7.5 to 13. The etchant composition selectively removes molybdenum at an etch rate of 5-200 ?/min.
    Type: Application
    Filed: April 14, 2021
    Publication date: October 21, 2021
    Inventors: Atanu K. DAS, Daniela WHITE, Emanuel I. COOPER, Eric HONG, JeongYeol YANG, Juhee YEO, Michael L. WHITE, SeongJin HONG, SeungHyun CHAE, Steven A. LIPPY, WonLae KIM
  • Patent number: 10790187
    Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues and aluminum-containing material, e.g., aluminum oxide, in the production of semiconductors that utilize an aluminum-containing etch stop layer. The compositions have a high selectivity for post-etch residue and aluminum-containing materials relative to low-k dielectric materials, cobalt-containing materials and other metals on the microelectronic device.
    Type: Grant
    Filed: January 17, 2018
    Date of Patent: September 29, 2020
    Assignee: ENTEGRIS, INC.
    Inventors: Emanuel I. Cooper, Makonnen Payne, WonLae Kim, Eric Hong, Sheng-Hung Tu, Chieh Ju Wang, Chia-Jung Hsu
  • Patent number: 10577567
    Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues in the production of semiconductors. There is provided a stock composition comprising: a tetraalkylammonium hydroxide base or a quaternary trialkylalkanolamine base; a corrosion inhibitor; and a combination of at least two or more polyprotic acids or salts thereof, wherein at least one said polyprotic acid or salt thereof contains phosphorous.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: March 3, 2020
    Assignee: Entegris, Inc.
    Inventors: Makonnen Payne, Emanuel I. Cooper, WonLae Kim, Eric Hong, Sean Kim
  • Patent number: 10352951
    Abstract: The present invention relates to analytical testing devices including micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, performing one or more types of coagulation assays using one or more micro-environment sensors in a single point of care combined test cartridge. For example, the present invention may be directed to test sensor including at least one transducer coated with a polymer layer. The polymer layer comprises a thrombin-cleavable peptide with a detectable moiety.
    Type: Grant
    Filed: January 25, 2018
    Date of Patent: July 16, 2019
    Assignee: Abbott Point of Care Inc.
    Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha R K Sutrala, Eric Hong, Sheila Diane Ball
  • Publication number: 20190154710
    Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.
    Type: Application
    Filed: January 28, 2019
    Publication date: May 23, 2019
    Applicant: Abbott Point of Care Inc.
    Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
  • Patent number: 10247741
    Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: April 2, 2019
    Assignee: Abbott Point of Care Inc.
    Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
  • Publication number: 20180204764
    Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues and aluminum-containing material, e.g., aluminum oxide, in the production of semiconductors that utilize an aluminum-containing etch stop layer. The compositions have a high selectivity for post-etch residue and aluminum-containing materials relative to low-k dielectric materials, cobalt-containing materials and other metals on the microelectronic device.
    Type: Application
    Filed: January 17, 2018
    Publication date: July 19, 2018
    Inventors: Emanuel I. Cooper, Makonnen Payne, WonLae Kim, Eric Hong, Sheng-Hung Tu, Chieh Ju Wang, Chia-Jung Hsu
  • Publication number: 20180164331
    Abstract: The present invention relates to analytical testing devices including micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, performing one or more types of coagulation assays using one or more micro-environment sensors in a single point of care combined test cartridge. For example, the present invention may be directed to test sensor including at least one transducer coated with a polymer layer. The polymer layer comprises a thrombin-cleavable peptide with a detectable moiety.
    Type: Application
    Filed: January 25, 2018
    Publication date: June 14, 2018
    Applicant: Abbott Point of Care Inc.
    Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Sheila Diane Ball
  • Publication number: 20180148669
    Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues in the production of semiconductors. There is provided a stock composition comprising: a tetraalkylammonium hydroxide base or a quaternary trialkylalkanolamine base; a corrosion inhibitor; and a combination of at least two or more polyprotic acids or salts thereof, wherein at least one said polyprotic acid or salt thereof contains phosphorous.
    Type: Application
    Filed: November 22, 2017
    Publication date: May 31, 2018
    Inventors: Makonnen Payne, Emmanuel I. Cooper, WonLae Kim, Eric Hong, Sean Kim
  • Patent number: 9903877
    Abstract: The present invention relates to analytical testing devices including micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, performing one or more types of coagulation assays using one or more micro-environment sensors in a single point of care combined test cartridge. For example, the present invention may be directed to test sensor including at least one transducer coated with a polymer layer. The polymer layer comprises a thrombin-cleavable peptide with a detectable moiety.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: February 27, 2018
    Assignee: Abbott Point of Care Inc.
    Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha R K Sutrala, Eric Hong, Sheila Diane Ball
  • Patent number: 9685995
    Abstract: Described herein are techniques related one or more systems, apparatuses, methods, etc. for integrating a near field communications (NFC) coil antenna in a portable device. For example, the NFC antenna is integrated under a metal chassis of the portable device. The metal chassis and a conductive coating—that is integrated underneath the full metal chassis—are designed to include one or more slots to provide high impedance to Eddy current induced in the conductive coating.
    Type: Grant
    Filed: July 13, 2015
    Date of Patent: June 20, 2017
    Assignee: Intel Corporation
    Inventors: Songnan Yang, Hao-Han Hsu, Ulun Karacaoglu, Anand Konanur, Eric Hong