Patents by Inventor Eric Hong
Eric Hong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12272560Abstract: Compositions useful for the selective etching, i.e., removal, of metal oxide hard masks such as zirconium oxide and hafnium oxide, often used as hard masks in microelectronic devices, in the presence of other materials such as polysilicon, silicon dioxide, silicon nitride, and tungsten are provided.Type: GrantFiled: December 22, 2021Date of Patent: April 8, 2025Assignee: ENTEGRIS, INC.Inventors: SeungHyun Chae, SeongJin Hong, Eric Hong, Juhee Yeo, WonLae Kim, JeongYeol Yang
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Publication number: 20250019590Abstract: Provided are compositions and methods for selectively etching titanium nitride, generally leaving molybdenum present unaffected by the process, as well as any aluminum oxide, silicon dioxide, and polysilicon which may be present on the device. In general, the compositions of the invention were able to achieve titanium nitride etch rates exceeding 3.5 ?/minute, thereby providing uniform recess top and bottom layers in patterns.Type: ApplicationFiled: August 15, 2024Publication date: January 16, 2025Inventors: Eric Hong, SeongJin Hong, WonLae Kim, JeongYeol Yang, SeungHyun Chae, JuHee Yeo
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Patent number: 12152187Abstract: Provided are compositions and methods for selectively etching titanium nitride, generally leaving molybdenum present unaffected by the process, as well as any aluminum oxide, silicon dioxide, and polysilicon which may be present on the device. In general, the compositions of the invention were able to achieve titanium nitride etch rates exceeding 3.5 ?/minute, thereby providing uniform recess top and bottom layers in patterns.Type: GrantFiled: August 13, 2021Date of Patent: November 26, 2024Assignee: ENTEGRIS, INC.Inventors: Eric Hong, SeongJin Hong, WonLae Kim, JeongYeol Yang, SeungHyun Chae, JuHee Yeo
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Publication number: 20230030323Abstract: An etchant composition and method for etching molybdenum from a microelectronic device at an etch rate are described. A microelectronic device is contacted with an etchant composition for a time sufficient to at least partially remove the molybdenum. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base and has a pH of from 7.5 to 13. The etchant composition selectively removes molybdenum at an etch rate of 5-200 ?/min.Type: ApplicationFiled: September 21, 2022Publication date: February 2, 2023Inventors: Atanu K. Das, Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang, Juhee Yeo, Michael L. White, SeongJin Hong, SeungHyun Chae, Steven A. Lippy, WonLae Kim
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Patent number: 11492709Abstract: An etchant composition and method for etching molybdenum from a microelectronic device at an etch rate are described. A microelectronic device is contacted with an etchant composition for a time sufficient to at least partially remove the molybdenum. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base and has a pH of from 7.5 to 13. The etchant composition selectively removes molybdenum at an etch rate of 5-200 ?/min.Type: GrantFiled: April 14, 2021Date of Patent: November 8, 2022Assignee: ENTEGRIS, INC.Inventors: Atanu K. Das, Daniela White, Emanuel I. Cooper, Eric Hong, JeongYeol Yang, Juhee Yeo, Michael L. White, SeongJin Hong, SeungHyun Chae, Steven A. Lippy, WonLae Kim
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Publication number: 20220208553Abstract: Compositions useful for the selective etching, i.e., removal, of metal oxide hard masks such as zirconium oxide and hafnium oxide, often used as hard masks in microelectronic devices, in the presence of other materials such as polysilicon, silicon dioxide, silicon nitride, and tungsten are provided.Type: ApplicationFiled: December 22, 2021Publication date: June 30, 2022Inventors: SeungHyun Chae, SeongJin Hong, Eric Hong, Juhee Yeo, WonLae Kim, JeongYeol Yang
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Publication number: 20220049160Abstract: Provided are compositions and methods for selectively etching titanium nitride, generally leaving molybdenum present unaffected by the process, as well as any aluminum oxide, silicon dioxide, and polysilicon which may be present on the device. In general, the compositions of the invention were able to achieve titanium nitride etch rates exceeding 3.5 ?/minute, thereby providing uniform recess top and bottom layers in patterns.Type: ApplicationFiled: August 13, 2021Publication date: February 17, 2022Inventors: Eric HONG, SeongJin HONG, WonLae KIM, JeongYeol YANG, SeungHyun CHAE, JuHee YEO
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Publication number: 20220003790Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.Type: ApplicationFiled: September 15, 2021Publication date: January 6, 2022Applicant: Abbott Point of Care Inc.Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
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Patent number: 11156620Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.Type: GrantFiled: January 28, 2019Date of Patent: October 26, 2021Assignee: Abbott Point of Care Inc.Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha R K Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
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Publication number: 20210324525Abstract: An etchant composition and method for etching molybdenum from a microelectronic device at an etch rate are described. A microelectronic device is contacted with an etchant composition for a time sufficient to at least partially remove the molybdenum. The etchant composition comprises at least one oxidizing agent, at least one oxidizing agent stabilizer, and at least one base and has a pH of from 7.5 to 13. The etchant composition selectively removes molybdenum at an etch rate of 5-200 ?/min.Type: ApplicationFiled: April 14, 2021Publication date: October 21, 2021Inventors: Atanu K. DAS, Daniela WHITE, Emanuel I. COOPER, Eric HONG, JeongYeol YANG, Juhee YEO, Michael L. WHITE, SeongJin HONG, SeungHyun CHAE, Steven A. LIPPY, WonLae KIM
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Patent number: 10790187Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues and aluminum-containing material, e.g., aluminum oxide, in the production of semiconductors that utilize an aluminum-containing etch stop layer. The compositions have a high selectivity for post-etch residue and aluminum-containing materials relative to low-k dielectric materials, cobalt-containing materials and other metals on the microelectronic device.Type: GrantFiled: January 17, 2018Date of Patent: September 29, 2020Assignee: ENTEGRIS, INC.Inventors: Emanuel I. Cooper, Makonnen Payne, WonLae Kim, Eric Hong, Sheng-Hung Tu, Chieh Ju Wang, Chia-Jung Hsu
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Patent number: 10577567Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues in the production of semiconductors. There is provided a stock composition comprising: a tetraalkylammonium hydroxide base or a quaternary trialkylalkanolamine base; a corrosion inhibitor; and a combination of at least two or more polyprotic acids or salts thereof, wherein at least one said polyprotic acid or salt thereof contains phosphorous.Type: GrantFiled: November 22, 2017Date of Patent: March 3, 2020Assignee: Entegris, Inc.Inventors: Makonnen Payne, Emanuel I. Cooper, WonLae Kim, Eric Hong, Sean Kim
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Patent number: 10352951Abstract: The present invention relates to analytical testing devices including micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, performing one or more types of coagulation assays using one or more micro-environment sensors in a single point of care combined test cartridge. For example, the present invention may be directed to test sensor including at least one transducer coated with a polymer layer. The polymer layer comprises a thrombin-cleavable peptide with a detectable moiety.Type: GrantFiled: January 25, 2018Date of Patent: July 16, 2019Assignee: Abbott Point of Care Inc.Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha R K Sutrala, Eric Hong, Sheila Diane Ball
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Publication number: 20190154710Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.Type: ApplicationFiled: January 28, 2019Publication date: May 23, 2019Applicant: Abbott Point of Care Inc.Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
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Patent number: 10247741Abstract: The present invention relates to sample analysis cartridges comprising micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, to performing coagulation assays using micro-environment sensors in a point of care sample analysis cartridge. For example, the present invention may be directed to a sample analysis cartridge including an inlet chamber configured to receive a biological sample, and a conduit fluidically connected to the inlet chamber and configured to receive the biological sample from the inlet chamber. The conduit may include a micro-environment prothrombin time (PT) sensor, and a micro-environment activated partial thromboplastin time (aPTT) sensor.Type: GrantFiled: September 25, 2015Date of Patent: April 2, 2019Assignee: Abbott Point of Care Inc.Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Jay Kendall Taylor, Sheila Diane Ball
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Publication number: 20180204764Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues and aluminum-containing material, e.g., aluminum oxide, in the production of semiconductors that utilize an aluminum-containing etch stop layer. The compositions have a high selectivity for post-etch residue and aluminum-containing materials relative to low-k dielectric materials, cobalt-containing materials and other metals on the microelectronic device.Type: ApplicationFiled: January 17, 2018Publication date: July 19, 2018Inventors: Emanuel I. Cooper, Makonnen Payne, WonLae Kim, Eric Hong, Sheng-Hung Tu, Chieh Ju Wang, Chia-Jung Hsu
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Publication number: 20180164331Abstract: The present invention relates to analytical testing devices including micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, performing one or more types of coagulation assays using one or more micro-environment sensors in a single point of care combined test cartridge. For example, the present invention may be directed to test sensor including at least one transducer coated with a polymer layer. The polymer layer comprises a thrombin-cleavable peptide with a detectable moiety.Type: ApplicationFiled: January 25, 2018Publication date: June 14, 2018Applicant: Abbott Point of Care Inc.Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha RK Sutrala, Eric Hong, Sheila Diane Ball
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Publication number: 20180148669Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues in the production of semiconductors. There is provided a stock composition comprising: a tetraalkylammonium hydroxide base or a quaternary trialkylalkanolamine base; a corrosion inhibitor; and a combination of at least two or more polyprotic acids or salts thereof, wherein at least one said polyprotic acid or salt thereof contains phosphorous.Type: ApplicationFiled: November 22, 2017Publication date: May 31, 2018Inventors: Makonnen Payne, Emmanuel I. Cooper, WonLae Kim, Eric Hong, Sean Kim
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Patent number: 9903877Abstract: The present invention relates to analytical testing devices including micro-environment sensors and methods for assaying coagulation in a fluid sample applied to the micro-environment sensors, and in particular, performing one or more types of coagulation assays using one or more micro-environment sensors in a single point of care combined test cartridge. For example, the present invention may be directed to test sensor including at least one transducer coated with a polymer layer. The polymer layer comprises a thrombin-cleavable peptide with a detectable moiety.Type: GrantFiled: September 25, 2015Date of Patent: February 27, 2018Assignee: Abbott Point of Care Inc.Inventors: Tian-Xian Zhao, Anjulia Chiu-Yuk Wong, Glenn Brian Martin, Katrina Petronilla Di Tullio, Isabelle Louisette Thibodeau, Steven Roy Breeze, Smitha R K Sutrala, Eric Hong, Sheila Diane Ball
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Patent number: 9685995Abstract: Described herein are techniques related one or more systems, apparatuses, methods, etc. for integrating a near field communications (NFC) coil antenna in a portable device. For example, the NFC antenna is integrated under a metal chassis of the portable device. The metal chassis and a conductive coating—that is integrated underneath the full metal chassis—are designed to include one or more slots to provide high impedance to Eddy current induced in the conductive coating.Type: GrantFiled: July 13, 2015Date of Patent: June 20, 2017Assignee: Intel CorporationInventors: Songnan Yang, Hao-Han Hsu, Ulun Karacaoglu, Anand Konanur, Eric Hong