Patents by Inventor Eric J. Hilton

Eric J. Hilton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for loading a semiconductor processing system
    Patent number: 6656028
    Abstract: A method for loading substrates in a processing system is provided. In one embodiment, a method for loading substrates utilizes a substrate loader that generally includes a wall having an exterior side with one or more apertures formed therethrough and a related method of loading a processing system. A door assembly is movably coupled to the wall in each of the apertures and is adapted to temporarily retain the substrate. A first portion of the door assembly substantially closes the aperture when the door assembly is in a first or closed position, and a second portion of the door assembly substantially closes the aperture when the door assembly is in a second or open position. A robot for transferring a substrate in a processing system is also provided.
    Type: Grant
    Filed: May 31, 2002
    Date of Patent: December 2, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Himanshu J. Chokshi, Ben Ju, Eric J. Hilton
  • Method for loading a semiconductor processing system
    Publication number: 20020146312
    Abstract: A method for loading substrates in a processing system is provided. In one embodiment, a method for loading substrates utilizes a substrate loader that generally includes a wall having an exterior side with one or more apertures formed therethrough and a related method of loading a processing system. A door assembly is movably coupled to the wall in each of the apertures and is adapted to temporarily retain the substrate. A first portion of the door assembly substantially closes the aperture when the door assembly is in a first or closed position, and a second portion of the door assembly substantially closes the aperture when the door assembly is in a second or open position. A robot for transferring a substrate in a processing system is also provided.
    Type: Application
    Filed: May 31, 2002
    Publication date: October 10, 2002
    Inventors: Himanshu J. Chokshi, Ben Ju, Eric J. Hilton
  • Substrate loader for a semiconductor processing system
    Patent number: 6413356
    Abstract: A substrate loader for a semiconductor substrate processing system that generally includes a wall having an exterior side with one or more apertures formed therethrough and a related method of loading a processing system. A door assembly is movably coupled to the wall in each of the apertures and is adapted to temporarily retain the substrate. A first portion of the door assembly substantially closes the aperture when the door assembly is in a first or closed position, and a second portion of the door assembly substantially closes the aperture when the door assembly is in a second or open position. A robot for transferring a substrate in a processing system is also provided.
    Type: Grant
    Filed: May 2, 2000
    Date of Patent: July 2, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Himanshu J. Chokshi, Ben Ju, Eric J. Hilton