Abstract: A method and apparatus for stabilizing startup gas flow through an MFC supplying reactant gases to a semiconductor system, wherein the method includes receiving a gas setpoint in a tunable activation circuit, determining a desired valve control voltage corresponding to the gas setpoint, and bypassing an MFC valve controller signal. The method further includes ramping a valve control voltage for a flow control valve of the MFC to the desired valve control voltage with the tunable activation circuit, and returning control of the MFC to an MFC valve controller circuit.

Abstract: An improved non-actuated non-return valve, the valve including a non-magnetic valve body having a substantially hollow interior portion in communication with a gas inlet and a gas outlet. A mechanically biased flow check assembly is positioned within the substantially hollow interior portion, the mechanically biased flow check assembly being configured to permit a gas flow from the gas inlet to the gas outlet. A first magnetic member may be provided and be in communication with the mechanically biased flow check assembly within the substantially hollow interior portion. A second magnetic member detachably positioned adjacent an exterior portion of the valve body may be provided, wherein a magnetic field of the second magnetic member is configured to impart motion to the mechanically biased flow check assembly when positioned proximate the exterior portion of the valve body.

Abstract: A method and apparatus for stabilizing startup gas flow through an MFC supplying reactant gases to a semiconductor system, wherein the method includes receiving a gas setpoint in a tunable activation circuit, determining a desired valve control voltage corresponding to the gas setpoint, and bypassing an MFC valve controller signal. The method further includes ramping a valve control voltage for a flow control valve of the MFC to the desired valve control voltage with the tunable activation circuit, and returning control of the MFC to an MFC valve controller circuit.

Abstract: A method and apparatus for stabilizing an initial gas flow in a soft start enabled mass flow controller, the method including opening a source gas inlet valve positioned upstream from the mass flow controller, allowing a source gas to flow to a flow control valve in the mass flow controller, and opening the flow control valve in the mass flow controller once the source gas has reached the flow control valve. The apparatus includes a soft start activation device in communication with a soft start capable mass flow controller. The soft start activation device including a timing circuit in communication with a common terminal and a negative voltage terminal of the mass flow controller, and a variable impedance timing control circuit in communication with the timing circuit.

Abstract: An improved non-actuated non-return valve, the valve including a non-magnetic valve body having a substantially hollow interior portion in communication with a gas inlet and a gas outlet. A mechanically biased flow check assembly is positioned within the substantially hollow interior portion, the mechanically biased flow check assembly being configured to permit a gas flow from the gas inlet to the gas outlet. A first magnetic member may be provided and be in communication with the mechanically biased flow check assembly within the substantially hollow interior portion. A second magnetic member detachably positioned adjacent an exterior portion of the valve body may be provided, wherein a magnetic field of the second magnetic member is configured to impart motion to the mechanically biased flow check assembly when positioned proximate the exterior portion of the valve body.