Patents by Inventor Eric J. Malstrom

Eric J. Malstrom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto
    Patent number: 7910494
    Abstract: A gas delivery system for supplying a process gas from a gas supply to a thermal processing furnace, a thermal processing furnace equipped with the gas delivery system, and methods for delivering process gas to a thermal processing furnace. The gas delivery system comprises a plurality of regulators, such as mass flow controllers, in a process gas manifold coupling a gas supply with a thermal processing furnace. The regulators establish a corresponding plurality of flows of a process gas at a plurality of flow rates communicated by the process gas manifold to the thermal processing furnace. The gas delivery system may be a component of the thermal processing furnace that further includes a liner that surrounds a processing space inside the thermal processing furnace.
    Type: Grant
    Filed: March 29, 2006
    Date of Patent: March 22, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Anthony Dip, Eric J. Malstrom