Patents by Inventor Eric J. Stewart
Eric J. Stewart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10985243Abstract: A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.Type: GrantFiled: August 13, 2020Date of Patent: April 20, 2021Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Josephine Bea Chang, Eric J. Stewart, Ken Alfred Nagamatsu, Robert S. Howell, Shalini Gupta
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Patent number: 10854600Abstract: A method of forming an integrated circuit can include forming a heterostructure over a substrate structure, wherein the given substrate structure comprises a given semiconductor material. The method can include etching a castellated channel region in an e-mode device area of the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, the ridge channels comprising another semiconductor material. The method can also include forming an isolation region on the heterostructure to electrically isolate the e-mode device area from a d-mode device area of the heterostructure. The method can further include forming a mask with an opening that defines a castellated gate opening overlying the castellated channel region and the mask defines an opening overlaying a single planar gate overlying the d-mode device area of the heterostructure. The method can also include performing a contact fill with conductive material to form a castellated gate contact.Type: GrantFiled: September 20, 2019Date of Patent: December 1, 2020Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Justin Andrew Parke, Eric J. Stewart, Robert S. Howell, Howell George Henry, Bettina Nechay, Harlan Carl Cramer, Matthew Russell King, Shalini Gupta, Ronald G. Freitag, Karen Marie Renaldo
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Publication number: 20200373384Abstract: A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.Type: ApplicationFiled: August 13, 2020Publication date: November 26, 2020Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: JOSEPHINE BEA CHANG, ERIC J. STEWART, KEN ALFRED NAGAMATSU, ROBERT S. HOWELL, SHALINI GUPTA
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Patent number: 10784341Abstract: A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.Type: GrantFiled: January 21, 2019Date of Patent: September 22, 2020Assignee: NORTHROP GRUMNIAN SYSTEMS CORPORATIONInventors: Josephine Bea Chang, Eric J. Stewart, Ken Alfred Nagamatsu, Robert S. Howell, Shalini Gupta
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Publication number: 20200235202Abstract: A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.Type: ApplicationFiled: January 21, 2019Publication date: July 23, 2020Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: JOSEPHINE BEA CHANG, ERIC J. STEWART, KEN ALFRED NAGAMATSU, ROBERT S. HOWELL, SHALINI GUPTA
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Publication number: 20200013775Abstract: A method of forming an integrated circuit can include forming a heterostructure over a substrate structure, wherein the given substrate structure comprises a given semiconductor material. The method can include etching a castellated channel region in an e-mode device area of the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, the ridge channels comprising another semiconductor material. The method can also include forming an isolation region on the heterostructure to electrically isolate the e-mode device area from a d-mode device area of the heterostructure. The method can further include forming a mask with an opening that defines a castellated gate opening overlying the castellated channel region and the mask defines an opening overlaying a single planar gate overlying the d-mode device area of the heterostructure. The method can also include performing a contact fill with conductive material to form a castellated gate contact.Type: ApplicationFiled: September 20, 2019Publication date: January 9, 2020Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: JUSTIN ANDREW PARKE, ERIC J. STEWART, ROBERT S. HOWELL, HOWELL GEORGE HENRY, BETTINA NECHAY, HARLAN CARL CRAMER, MATTHEW RUSSELL KING, SHALINI GUPTA, RONALD G. FREITAG, KAREN MARIE RENALDO
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Patent number: 10468406Abstract: A circuit is provided that includes a castellated channel device that comprises a heterostructure overlying a substrate structure, a castellated channel device area formed in the heterostructure that defines a plurality of ridge channels interleaved between a plurality of trenches, and a three-sided castellated conductive gate contact that extends across the castellated channel device area. The three-sided gate contact substantially surrounds each ridge channel around their tops and their sides to overlap a channel interface of heterostructure of each of the plurality of ridge channels. The three-sided castellated conductive gate contact extends along at least a portion of a length of each ridge channel.Type: GrantFiled: October 8, 2014Date of Patent: November 5, 2019Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Justin Andrew Parke, Eric J. Stewart, Robert S. Howell, Howell George Henry, Bettina Nechay, Harlan Carl Cramer, Matthew Russell King, Shalini Gupta, Ronald G. Freitag, Karen Marie Renaldo
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Patent number: 10084075Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.Type: GrantFiled: June 15, 2017Date of Patent: September 25, 2018Assignee: Northrop Grumman Systems CorporationInventors: Bettina A. Nechay, Shalini Gupta, Matthew Russell King, Eric J. Stewart, Robert S. Howell, Justin Andrew Parke, Harlan Carl Cramer, Howell George Henry, Ronald G. Freitag, Karen Marie Renaldo
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Publication number: 20170288045Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.Type: ApplicationFiled: June 15, 2017Publication date: October 5, 2017Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: BETTINA A. NECHAY, SHALINI GUPTA, MATTHEW RUSSELL KING, ERIC J. STEWART, ROBERT S. HOWELL, JUSTIN ANDREW PARKE, HARLAN CARL CRAMER, HOWELL GEORGE HENRY, RONALD G. FREITAG, KAREN MARIE RENALDO
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Patent number: 9773897Abstract: A transistor device is provided that includes a base structure and a superlattice structure that overlies the base structure. The superlattice structure comprises a multichannel ridge having sides that extend to the base structure. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge. A three-sided gate configuration is provided that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth. The three-sided gate configuration is configured to re-distribute peak electric fields along the three-sided gate configuration to facilitate the increase in breakdown voltage of the transistor device.Type: GrantFiled: April 1, 2015Date of Patent: September 26, 2017Assignee: Northrop Grumman Systems CorporationInventors: Bettina A. Nechay, Robert S. Howell, Eric J. Stewart, Howell George Henry, Justin Andrew Parke, Ronald G. Freitag
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Patent number: 9755021Abstract: An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterorstructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.Type: GrantFiled: June 17, 2016Date of Patent: September 5, 2017Assignee: Northrop Grumman Systems CorporationInventors: Karen M. Renaldo, Eric J. Stewart, Robert S. Howell, Howell George Henry, Harlan Carl Cramer, Justin Andrew Parke, Matthew Russell King
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Patent number: 9711615Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.Type: GrantFiled: July 28, 2016Date of Patent: July 18, 2017Assignee: Northrop Grumman Systems CorporationInventors: Bettina A. Nechay, Shalini Gupta, Matthew Russell King, Eric J. Stewart, Robert S. Howell, Justin Andrew Parke, Harlan Carl Cramer, Howell George Henry, Ronald G. Freitag, Karen Marie Renaldo
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Patent number: 9711616Abstract: A dual-channel field effect transistor (FET) device having increased amplifier linearity and a method of manufacturing same are disclosed. In an embodiment, the device includes a channel layer having a top surface and provided within a channel between a source electrode and a drain electrode. A barrier layer is formed on the channel layer in alternating first and second barrier thicknesses along the channel. The first barrier thicknesses form thinner regions and the second barrier thicknesses form thicker regions. A gate electrode is deposited on the barrier layer. The thinner regions have a first pinch-off voltage and the thicker regions have a larger second pinch-off voltage, such that the thinner and thicker regions are configured to turn on at different points on a drain current-gate voltage transfer curve. Transfer curve linearity is increased as a function of the gate voltage.Type: GrantFiled: December 23, 2014Date of Patent: July 18, 2017Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: Eric J. Stewart, Bettina A. Nechay, Karen M. Renaldo, Howell G. Henry, Ronald G. Freitag
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Publication number: 20160336425Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.Type: ApplicationFiled: July 28, 2016Publication date: November 17, 2016Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: BETTINA A. NECHAY, SHALINI GUPTA, MATTHEW RUSSELL KING, ERIC J. STEWART, ROBERT S. HOWELL, JUSTIN ANDREW PARKE, HARLAN CARL CRAMER, HOWELL GEORGE HENRY, RONALD G. FREITAG, KAREN MARIE RENALDO
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Publication number: 20160315152Abstract: An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterorstructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.Type: ApplicationFiled: June 17, 2016Publication date: October 27, 2016Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: KAREN M. RENALDO, ERIC J. STEWART, ROBERT S. HOWELL, HOWELL GEORGE HENRY, HARLAN CARL CRAMER, JUSTIN ANDREW PARKE, MATTHEW RUSSELL KING
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Patent number: 9472634Abstract: A device is provided that comprises a first pillar disposed in a first region and overlying a base structure, and a second pillar disposed in a second region and overlying the base structure and being spaced apart from the first pillar by a device region. A bridge is disposed in the device region with a first end connected to the first pillar and a second end connected to the second pillar. The bridge includes a top, sides, and a bottom. The bridge is formed from one or more heterostructures with an undercut opening extending from the bottom to an underlying structure. A four-sided conductive contact wraps around and substantially surrounds the bridge around its top, its sides, and its bottom along at least a portion of its length between the first and second end.Type: GrantFiled: March 9, 2016Date of Patent: October 18, 2016Assignee: Northrop Grumman Systems CorporationInventors: Eric J Stewart, Howell George Henry, Robert S. Howell, Matthew Russell King, Justin Andrew Parke, Bettina Nechay, Harlan Carl Cramer, Ronald G Freitag, Karen Marie Renaldo
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Patent number: 9466679Abstract: A device is provided that comprises a first pillar disposed in a first region and overlying a base structure, and a second pillar disposed in a second region and overlying the base structure and being spaced apart from the first pillar by a device region. A bridge is disposed in the device region with a first end connected to the first pillar and a second end connected to the second pillar. The bridge includes a top, sides, and a bottom. The bridge is formed from one or more heterostructures with an undercut opening extending from the bottom to an underlying structure. A four-sided conductive contact wraps around and substantially surrounds the bridge around its top, its sides, and its bottom along at least a portion of its length between the first and second end.Type: GrantFiled: August 13, 2014Date of Patent: October 11, 2016Assignee: Northrop Grumman Systems CorporationInventors: Eric J. Stewart, Howell George Henry, Robert S. Howell, Matthew Russell King, Justin Andrew Parke, Bettina Nechay, Harlan Carl Cramer, Karen Marie Renaldo, Ronald G. Freitag
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Publication number: 20160293713Abstract: A transistor device is provided that includes a base structure and a superlattice structure that overlies the base structure. The superlattice structure comprises a multichannel ridge having sides that extend to the base structure. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge. A three-sided gate configuration is provided that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth. The three-sided gate configuration is configured to re-distribute peak electric fields along the three-sided gate configuration to facilitate the increase in breakdown voltage of the transistor device.Type: ApplicationFiled: April 1, 2015Publication date: October 6, 2016Applicant: NORTHROP GRUMMAN SYSTEMS CORPORATIONInventors: BETTINA A. NECHAY, Robert S. Howell, Eric J. Stewart, Howell George Henry, Justin Andrew Parke, Ronald G. Freitag
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Patent number: 9419120Abstract: A transistor device is provided that comprises a base structure, and a superlattice structure overlying the base structure and comprising a multichannel ridge having sloping sidewalls. The multichannel ridge comprises a plurality of heterostructures that each form a channel of the multichannel ridge, wherein a parameter of at least one of the heterostructures is varied relative to other heterostructures of the plurality of heterostructures. The transistor device further comprises a three-sided gate contact that wraps around and substantially surrounds the top and sides of the multichannel ridge along at least a portion of its depth.Type: GrantFiled: November 5, 2014Date of Patent: August 16, 2016Assignee: Northrop Grumman Systems CorporationInventors: Bettina A. Nechay, Shalini Gupta, Matthew Russell King, Eric J. Stewart, Robert S. Howell, Justin Andrew Parke, Harlan Carl Cramer, Howell George Henry, Ronald G. Freitag, Karen Marie Renaldo
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Patent number: 9385224Abstract: An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterostructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.Type: GrantFiled: August 13, 2014Date of Patent: July 5, 2016Assignee: Northrop Grumman Systems CorporationInventors: Karen M. Renaldo, Eric J. Stewart, Robert S. Howell, Howell George Henry, Harlan Carl Cramer, Justin Andrew Parke, Matthew Russell King