Patents by Inventor Eric Land

Eric Land has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Variable thickness plate for forming variable wall thickness physical vapor deposition target
    Patent number: 7708868
    Abstract: A variable thickness sputtering target which increases the target material thickness at strategic locations to greatly improve the yield of usable wafers per target, and a method of manufacturing such target comprising forming a generally flat and circularly shaped target blank so that a thickness dimension between the top and bottom surfaces decreases as a function of radius of the target blank. The variable thickness target blank is then formed into a variable thickness dome shaped target member having a bottom portion and a sidewall portion, wherein a wall thickness of said variable thickness dome-shaped target member is thickest proximate a center portion of said bottom portion. In one embodiment of the invention, the variable thickness target blank is formed by clock rolling (or compression rolling) the target blank with crowned rolls to obtain a variable thickness target blank.
    Type: Grant
    Filed: May 30, 2006
    Date of Patent: May 4, 2010
    Assignee: Tosoh SMD, Inc.
    Inventors: David B. Smathers, Melvin K. Holcomb, Eric Land
  • Variable thickness plate for forming variable wall thickness physical vapor deposition target
    Publication number: 20070007131
    Abstract: A variable thickness sputtering target which increases the target material thickness at strategic locations to greatly improve the yield of usable wafers per target, and a method of manufacturing such target comprising forming a generally flat and circularly shaped target blank so that a thickness dimension between the top and bottom surfaces decreases as a function of radius of the target blank. The variable thickness target blank is then formed into a variable thickness dome shaped target member having a bottom portion and a sidewall portion, wherein a wall thickness of said variable thickness dome-shaped target member is thickest proximate a center portion of said bottom portion. In one embodiment of the invention, the variable thickness target blank is formed by clock rolling (or compression rolling) the target blank with crowned rolls to obtain a variable thickness target blank.
    Type: Application
    Filed: May 30, 2006
    Publication date: January 11, 2007
    Applicant: Tosoh SMD, Inc.
    Inventors: David Smathers, Melvin Holcomb, Eric Land