Patents by Inventor Eric Maiken

Eric Maiken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of monitoring thin-film processes and metrology tool thereof
    Patent number: 6594025
    Abstract: The present invention provides a method for monitoring a modifying-process taking place in a thin-film sample and thereby characterizing the sample thus modified, wherein the modifying-process is performed for purpose of improving physical properties of the sample. The present invention further provides a monitoring tool for characterizing various thin-film processes. Advantages of the method of the present invention are manifest in its non-intrusive nature, fast (or real-time) response, robust sensitivity, and versatility in a variety of thin-film processes. Another inherent advantage of the present invention is that an assortment of the “n&k” parameters can be obtained by using only measurement tool, in contrast to two (or more) simultaneous measurement tools used in the prior art.
    Type: Grant
    Filed: July 12, 2001
    Date of Patent: July 15, 2003
    Assignee: N&K Technology. Inc.
    Inventors: Abdul Rahim Forouhi, Dale A. Harrison, Eric Maiken, John C. Lam