Abstract: A method for producing a measurement structure for measuring alignment of patterns formed in one or more layers of patternable material uses multiple exposure tools having different resolution limits and maximum expose field sizes. The measurement structure includes multiple complementary and coincident parts. An abutting field pattern is exposed and stitched in a layer of patternable material using a first exposure tool and a first mask. The abutting field pattern includes a first portion of the multiple complementary parts. A periphery pattern is exposed in the same layer or in a different layer of patternable material using a second exposure tool and a second mask. The periphery pattern includes a second portion of the multiple complementary parts. A maximum expose field of the first exposure tool is smaller than the maximum expose field of the second exposure tool.

Abstract: A method for calibrating an image sensor having multiple outputs, the method includes the steps of capturing an image on the image sensor, injecting one or more substantially identical pairs of signals into corresponding portions of the captured image, reading out the captured image with the injected signals into two or more outputs, and comparing two substantially identical signals from corresponding portions of the image, which comparison is used for calibrating the image.

Abstract: A method for detecting and removing noise from an image, the method includes the steps of applying a frequency transform to the image for obtaining a magnitude image; applying a threshold value to values of the magnitude image for obtaining threshold values; setting one or more threshold values to a predetermined value; and reconstructing the image from the magnitude image having the predetermined values for removing noise from the image.

Abstract: A method for detecting and removing noise from an image, the method includes the steps of applying a frequency transform to the image for obtaining a magnitude image; applying a threshold value to values of the magnitude image for obtaining threshold values; setting one or more threshold values to a predetermined value; and reconstructing the image from the magnitude image having the predetermined values for removing noise from the image.

Abstract: An image sensor comprising a plurality of pixels arranged in at least two sub-arrays; first and second delay areas respectively connected to each sub-array for respectively receiving charge from the sub-array; wherein a pitch of the first delay area is different from the second delay area and at least two readout mechanisms for respectively receiving the charge from the delay areas, wherein a same line from the first and second sub-arrays is received by each delay area at substantially the same time.

Abstract: A method for testing an image sensor for photoresponse uniformity, the method includes the steps of providing a light source having inherent non-uniform light intensity characteristics; providing a light sensing device for measuring an intensity response of the light source on a predetermined image plane; determining an area on the image plane corresponding to an area for the image sensor; measuring pre-selected points of the determined area by the light sensing device for measuring incident light intensity from the light source on the image plane; interpolating non-measured points on the image plane representing an estimate of the non-uniformity of the light source at the non-measured points; inverting the interpolated image to represent the inverse of the light source non-uniformity; and applying the inverted image to the response of the image sensor which compensates for light source non-uniformity and enables the ability to quantify accurately the non-uniformity of the image sensor.

Abstract: An efficient area imager CCD readout scheme in which two electrodes in each column are used to store charge packets and a three electrode technique is used to implement the readout function. A static clock generator drives the CCD electrodes to provide the three electrode technique.