Patents by Inventor Eric Michael Fleming

Eric Michael Fleming has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chlorosilane and hydrogen reactor
    Patent number: 5906799
    Abstract: The present invention is a reactor for the hydrogenation of chlorosilanes at temperatures above about 600.degree. C. The reactor comprises one or more of the following improvements: (1) a reaction chamber formed from a silicon carbide coated carbon fiber composite, (2) a heating element formed from a silicon carbide coated carbon fiber composite, and (3) one or more silicon nitride insulators electrically insulating the heating element.
    Type: Grant
    Filed: June 1, 1992
    Date of Patent: May 25, 1999
    Assignee: Hemlock Semiconductor Corporation
    Inventors: Richard Anthony Burgie, Eric Michael Fleming