Patents by Inventor Eric Minet

Eric Minet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical measurement apparatus, spectroscopic ellipsometer, recording medium, and measurement method
    Patent number: 8199336
    Abstract: An optical measurement apparatus includes: a storage processing part storing into a storage part a plurality of main reference positions where measurement is to be performed and at least one movement value relative to each main reference position; a main measuring part moving a measurement position to one of the main reference positions stored in the storage part, then irradiating light, and then measuring a change in a state of reflected light; an auxiliary measuring part moving the measurement position to an auxiliary reference position based on the movement value relative to one of the main reference positions stored in the storage part, then irradiating light, and then measuring a change in a state of reflected light; a main calculating part performing analysis and calculating a film thickness or an optical constant; and an auxiliary calculating part performing analysis and calculating a film thickness or an optical constant.
    Type: Grant
    Filed: November 5, 2009
    Date of Patent: June 12, 2012
    Assignee: Horiba, Ltd.
    Inventors: Nataliya Nabatova-Gabain, Eric Minet
  • OPTICAL MEASUREMENT APPARATUS, SPECTROSCOPIC ELLIPSOMETER, RECORDING MEDIUM, AND MEASUREMENT METHOD
    Publication number: 20100121607
    Abstract: An optical measurement apparatus includes: a storage processing part storing into a storage part a plurality of main reference positions where measurement is to be performed and at least one movement value relative to each main reference position; a main measuring part moving a measurement position to one of the main reference positions stored in the storage part, then irradiating light, and then measuring a change in a state of reflected light; an auxiliary measuring part moving the measurement position to an auxiliary reference position based on the movement value relative to one of the main reference positions stored in the storage part, then irradiating light, and then measuring a change in a state of reflected light; a main calculating part performing analysis and calculating a film thickness or an optical constant; and an auxiliary calculating part performing analysis and calculating a film thickness or an optical constant.
    Type: Application
    Filed: November 5, 2009
    Publication date: May 13, 2010
    Inventors: Nataliya Nabatova-Gabain, Eric Minet