Patents by Inventor Eric P. Goodwin

Eric P. Goodwin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Encoder head designs
    Patent number: 10378933
    Abstract: Encoder systems provide measurement and reference optical paths based on propagation in a common set of optical elements along paths that are displaced angularly or spatially. Associated measurement and reference beams are reflected by corner cubes to as to define first paths and second paths. The measurement and reference beams are combined to determine a work piece displacement in a manufacturing process.
    Type: Grant
    Filed: October 20, 2014
    Date of Patent: August 13, 2019
    Assignee: Nikon Corporation
    Inventor: Eric P. Goodwin
  • ENCODER HEAD DESIGNS
    Publication number: 20150108337
    Abstract: Encoder systems provide measurement and reference optical paths based on propagation in a common set of optical elements along paths that are displaced angularly or spatially. Associated measurement and reference beams are reflected by corner cubes to as to define first paths and second paths. The measurement and reference beams are combined to determine a work piece displacement in a manufacturing process.
    Type: Application
    Filed: October 20, 2014
    Publication date: April 23, 2015
    Inventor: Eric P. Goodwin
  • Optical Imaging System and Method for Imaging Up to Four Reticles to a Single Imaging Location
    Publication number: 20100091257
    Abstract: A catadioptric optical imaging system and method is provided, in which up to four (4) reticles are imaged to a single imaging location (e.g. for imaging substrates), in a manner designed to provide high throughput, with a relatively high resolution, and with substrates whose size may approach 450 mm.
    Type: Application
    Filed: June 9, 2009
    Publication date: April 15, 2010
    Applicant: Nikon Corporation
    Inventors: David M. Williamson, Daniel G. Smith, Michael B. Binnard, W.Thomas Novak, Eric P. Goodwin