Patents by Inventor Eric Pei

Eric Pei has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating a semiconductor device having a lanthanum-family-based oxide layer
    Patent number: 8101525
    Abstract: Methods for fabricating a semiconductor device having a lanthanum-family-based oxide layer are described. A gate stack having a lanthanum-family-based oxide layer is provided above a substrate. At least a portion of the lanthanum-family-based oxide layer is modified to form a lanthanum-family-based halide portion. The lanthanum-family-based halide portion is removed with a water vapor treatment.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: January 24, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Meihua Shen, Noel Sun, Nicolas Gani, Han-Hsiang Chen, Eric Pei, Weimin Zeng, Thorsten B. Lill, Uday Mitra, Ellie Y. Yieh
  • METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE HAVING A LANTHANUM-FAMILY-BASED OXIDE LAYER
    Publication number: 20100210112
    Abstract: Methods for fabricating a semiconductor device having a lanthanum-family-based oxide layer are described. A gate stack having a lanthanum-family-based oxide layer is provided above a substrate. At least a portion of the lanthanum-family-based oxide layer is modified to form a lanthanum-family-based halide portion. The lanthanum-family-based halide portion is removed with a water vapor treatment.
    Type: Application
    Filed: February 13, 2009
    Publication date: August 19, 2010
    Applicant: Applied Materials, Inc.
    Inventors: Meihua Shen, Noel Sun, Nicolas Gani, Han-Hsiang Chen, Eric Pei, Weimin Zeng, Thorsten B. Lill, Uday Mitra, Ellie Y. Yieh