Patents by Inventor Eric Pierre-Yves VENNAT

Eric Pierre-Yves VENNAT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing damper device, lithographic apparatus, projection system, and device manufacturing method
    Patent number: 11835106
    Abstract: The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.
    Type: Grant
    Filed: November 15, 2018
    Date of Patent: December 5, 2023
    Assignee: ASML Netherlands B.V.
    Inventors: Derk Ten Hoopen, Francois-Xavier Debiesme, Eric Pierre-Yves Vennat
  • Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffness
    Patent number: 11029612
    Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator.
    Type: Grant
    Filed: February 15, 2018
    Date of Patent: June 8, 2021
    Assignee: ASML Netherlands B.V.
    Inventors: Maarten Hartger Kimman, Hans Butler, Olof Martinus Josephus Fischer, Christiaan Alexander Hoogendam, Theodorus Mattheus Joannus Maria Huizinga, Johannes Marinus Maria Rovers, Eric Pierre-Yves Vennat, Maurice Willem Jozef Etienne Wijckmans
  • Method for Manufacturing Damper Device, Lithographic Apparatus, Projection System, and Device Manufacturing Method
    Publication number: 20210079971
    Abstract: The invention relates a method for manufacturing a damper device including a first part and a second part, said method comprising the following steps: a) providing a damping material in a space in between the first part and the second part, such that the damping material is in a compressed state in the space; and b) heating the device to a predetermined temperature in order to adhere the damping material to the first part and the second part.
    Type: Application
    Filed: November 15, 2018
    Publication date: March 18, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Derk TEN HOOPEN, Francois-Xavier DEBIESME, Eric Pierre-Yves VENNAT
  • BEARING DEVICE, MAGNETIC GRAVITY COMPENSATOR, VIBRATION ISOLATION SYSTEM, LITHOGRAPHIC APPARATUS, METHOD TO CONTROL A GRAVITY COMPENSATOR HAVING A NEGATIVE STIFFNESS, AND SPRING
    Publication number: 20200049203
    Abstract: The invention relates to a bearing device arranged to support in a vertical direction a first part of an apparatus with respect to a second part of the apparatus, comprising a magnetic gravity compensator.
    Type: Application
    Filed: February 15, 2018
    Publication date: February 13, 2020
    Inventors: Maarten Hartger KIMMAN, Hans BUTLER, Olof Martinus Josephus FISCHER, Christiaan Alexander HOOGENDAM, Theodorus Mattheus Joannus Maria HUIZINGA, Johannes Marinus Maria ROVERS, Eric Pierre-Yves VENNAT, Maurice Willem Jozef Etiënne WIJCKMANS