Patents by Inventor Eric Ruhland

Eric Ruhland has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
    Patent number: 7997851
    Abstract: A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
    Type: Grant
    Filed: October 23, 2008
    Date of Patent: August 16, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Robert B. Moore, Eric Ruhland, Satish Sundar, Mario David Silvetti
  • Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
    Patent number: 7695232
    Abstract: A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
    Type: Grant
    Filed: June 15, 2006
    Date of Patent: April 13, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Robert B. Moore, Eric Ruhland, Satish Sundar, Mario David Silvetti
  • MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE FOR INTERFACING WITH SAME
    Publication number: 20090092466
    Abstract: A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
    Type: Application
    Filed: October 23, 2008
    Publication date: April 9, 2009
    Inventors: Robert B. Moore, Eric Ruhland, Satish Sundar, Mario David Silvetti
  • MULTI-LEVEL LOAD LOCK CHAMBER, TRANSFER CHAMBER, AND ROBOT SUITABLE FOR INTERFACING WITH SAME
    Publication number: 20070292244
    Abstract: A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
    Type: Application
    Filed: June 15, 2006
    Publication date: December 20, 2007
    Inventors: ROBERT B. MOORE, Eric Ruhland, Satish Sundar, Mario David Silvetti
  • Seal for an assembly in a vapor deposition chamber
    Patent number: D1027120
    Type: Grant
    Filed: December 17, 2020
    Date of Patent: May 14, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Yao-Hung Yang, Eric Ruhland, Saurabh M. Chaudhari, Dien-Yeh Wu, Philip Wayne Nagle, Aniruddha Pal, Sudhir R. Gondhalekar, Siamak Salimian, Scott Lin, Boon Sen Chan