Patents by Inventor Eric S. Sklar

Eric S. Sklar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Combination manual/pneumatic shut-off valve
    Patent number: 8656953
    Abstract: A method of preventing a mass flow controller from participating in crosstalk in an array of mass flow controllers is described. The method includes sensing and providing a signal indicative of a fluid pressure inside of a mass flow controller with a pressure sensor contained within the mass flow controller, determining a response of a control valve to a rapid pressure perturbation at the inlet of the mass flow controller using the signal indicative of the fluid pressure to avoid overcompensation for the rapid pressure perturbation, and adjusting a control valve contained within the mass flow controller downstream of the pressure sensor, based on the determined response, so that the mass flow controller avoids overcompensating for the rapid pressure perturbation. The pressure sensor is positioned such that the pressure sensor is sensitive to rapid pressure perturbations at the inlet of the mass flow controller.
    Type: Grant
    Filed: March 1, 2012
    Date of Patent: February 25, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Balarabe Nuhu Mohammed, Philip Barros, Raul A. Martin, Mark A. Crockett, Eric S. Sklar
  • COMBINATION MANUAL/PNEUMATIC SHUT-OFF VALVE
    Publication number: 20120161043
    Abstract: A method of preventing a mass flow controller from participating in crosstalk in an array of mass flow controllers is described. The method includes sensing and providing a signal indicative of a fluid pressure inside of a mass flow controller with a pressure sensor contained within the mass flow controller, determining a response of a control valve to a rapid pressure perturbation at the inlet of the mass flow controller using the signal indicative of the fluid pressure to avoid overcompensation for the rapid pressure perturbation, and adjusting a control valve contained within the mass flow controller downstream of the pressure sensor, based on the determined response, so that the mass flow controller avoids overcompensating for the rapid pressure perturbation. The pressure sensor is positioned such that the pressure sensor is sensitive to rapid pressure perturbations at the inlet of the mass flow controller.
    Type: Application
    Filed: March 1, 2012
    Publication date: June 28, 2012
    Inventors: Balarabe Nuhu Mohammed, Philip Barros, Raul A. Martin, Mark Adam Crockett, Eric S. Sklar
  • Pressure-insensitive mass flow controller
    Patent number: 8127783
    Abstract: A method of preventing a mass flow controller from participating in crosstalk in an array of mass flow controllers is described. The method includes sensing and providing a signal indicative of a fluid pressure inside of a mass flow controller with a pressure sensor contained within the mass flow controller, determining a response of a control valve to a rapid pressure perturbation at the inlet of the mass flow controller using the signal indicative of the fluid pressure to avoid overcompensation for the rapid pressure perturbation, and adjusting a control valve contained within the mass flow controller downstream of the pressure sensor, based on the determined response, so that the mass flow controller avoids overcompensating for the rapid pressure perturbation. The pressure sensor is positioned such that the pressure sensor is sensitive to rapid pressure perturbations at the inlet of the mass flow controller.
    Type: Grant
    Filed: February 23, 2007
    Date of Patent: March 6, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Mohammed Nuhu Balarabe, Philip Barros, Raul A. Martin, Mark A. Crockett, Eric S. Sklar