Patents by Inventor Eric Sohmen

Eric Sohmen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination system having a nested collector for annular illumination of an exit pupil
    Patent number: 7312462
    Abstract: There is provided an illumination system. The illumination system includes a source for light having a wavelength ?193 nm, a field plane, and a collector having a mirror shell for receiving a part of the light. The mirror shell is arranged so that a real image of the source is formed and comes to lie in a plane that is defocused relative to the field plane by more than 30 mm, so that the field plane is illuminated in a predetermined region, substantially homogeneously.
    Type: Grant
    Filed: August 31, 2004
    Date of Patent: December 25, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Wolfgang Singer, Johannes Wangler, Eric Sohmen
  • Illumination system having a nested collector for annular illumination of an exit pupil
    Publication number: 20050093041
    Abstract: There is provided an illumination system. The illumination system includes a source for light having a wavelength ?193 nm, a field plane, and a collector having a mirror shell for receiving a part of the light. The mirror shell is arranged so that a real image of the source is formed and comes to lie in a plane that is defocused relative to the field plane by more than 30 mm, so that the field plane is illuminated in a predetermined region, substantially homogeneously.
    Type: Application
    Filed: August 31, 2004
    Publication date: May 5, 2005
    Inventors: Wolfgang Singer, Johannes Wangler, Eric Sohmen