Abstract: A light source and the method for operating the same are disclosed. The light source includes first and second lasers, and first and second wavelength control assemblies. The lasers emit first and second light beams, respectively, at wavelengths that are determined by first and second wavelength control signals. First and second beam splitters split the first and second light beams, respectively, to create first and second sampling light beams. The first and second wavelength control assemblies receive sampling light beams and generate the first and second wavelength control signals such that the wavelengths of the first and second light beams differ by no more than a predetermined amount. The first and second wavelength control assemblies each include an absorption cell having a gas that has an optical absorption that varies with the wavelength of the first and second sampling light beams at wavelengths around the output wavelength of the light source.

Abstract: An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow angle. A diffraction is received by the interferometer core and is combined with the second component beam. The combination of the first and second component beams is measured to determine displacement of the diffraction grating.

Abstract: At least two discrete quarter wave plates are provided for use as plane mirrors or reflectors in a displacement measuring interferometer, where the plates share common or substantially common reflecting surface geometries. A plurality of geometrically matched discrete matched quarter wave plates reduces the amount of tilt between an input beam provided to, and an output measurement beam provided by, an interferometer, resulting in increased interferometer dynamic range.