Patents by Inventor Eric Tu

Eric Tu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11853026
    Abstract: Various embodiments include methods and apparatuses to provide human safety and machine safety and operations. In one example, a distributed interlock system includes at least one master device coupled to a number of slave device. The slave devices receive signals from one or more tools and provide the signals to the master device. The master device evaluates the signals and prevents unsafe conditions prior to one or more command executions, related to the unsafe conditions, being transmitted to one or more of the slave devices. Other methods and systems are disclosed.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: December 26, 2023
    Assignee: Lam Research Corporation
    Inventors: Eric Tu, Dirk Rudolph, Ales Janhar, John Folden Stumpf, Justin Remulla
  • Publication number: 20210232115
    Abstract: Various embodiments include methods and apparatuses to provide human safety and machine safety and operations. In one example, a distributed interlock system includes at least one master device coupled to a number of slave device. The slave devices receive signals from one or more tools and provide the signals to the master device. The master device evaluates the signals and prevents unsafe conditions prior to one or more command executions, related to the unsafe conditions, being transmitted to one or more of the slave devices. Other methods and systems are disclosed.
    Type: Application
    Filed: May 6, 2019
    Publication date: July 29, 2021
    Inventors: Eric Tu, Dirk Rudolph, Ales Janhar, John Folden Stumpf, Justin Remulla