Patents by Inventor Eric W. Seelig

Eric W. Seelig has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for making thin film tantalum oxide layers with enhanced dielectric properties and capacitors employing such layers
    Patent number: 5948216
    Abstract: The present applicants have discovered a method for making thin films comprising tantalum oxide that enhances the dielectric constant with or without TiO.sub.2 doping. Specifically, applicants have discovered sputtering Ta.sub.2 O.sub.5 in an oxygen-rich ambient at a temperature in excess of 450.degree. C. and preferably in excess of 550.degree. C., produces a new crystalline phase thin film having enhanced dielectric properties.
    Type: Grant
    Filed: May 17, 1996
    Date of Patent: September 7, 1999
    Assignee: Lucent Technologies Inc.
    Inventors: Robert J. Cava, Shang Y. Hou, Jueinai Raynien Kwo, Eric W. Seelig, Roderick K. Watts