Patents by Inventor Eric Williams Beach

Eric Williams Beach has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thin film resistor integration in a dual damascene structure
    Patent number: 7323751
    Abstract: A thin film resistor and at least one metal interconnect are formed in an integrated circuit. A first dielectric layer is formed over a metal interconnect layer. A thin film resistor is formed on the first dielectric layer and a second dielectric layer formed over the thin film resistor. Thin film resistor vias and the at least one trench are formed concurrently in the second dielectric layer. A trench via is then formed in the at least one trench. The trench via, the at least one trench and the thin film resistor vias are filled with a contact material layer to form thin film resistor contacts and at least one conductive line coupled to the metal interconnect layer.
    Type: Grant
    Filed: June 3, 2003
    Date of Patent: January 29, 2008
    Assignee: Texas Instruments Incorporated
    Inventors: Eric Williams Beach, Rajneesh Jaiswal
  • Thin film resistor integration in a dual damascene structure
    Publication number: 20040245575
    Abstract: A thin film resistor and at least one metal interconnect are formed in an integrated circuit. A first dielectric layer is formed over a metal interconnect layer. A thin film resistor is formed on the first dielectric layer and a second dielectric layer formed over the thin film resistor. Thin film resistor vias and the at least one trench are formed concurrently in the second dielectric layer. A trench via is then formed in the at least one trench. The trench via, the at least one trench and the thin film resistor vias are filled with a contact material layer to form thin film resistor contacts and at least one conductive line coupled to the metal interconnect layer.
    Type: Application
    Filed: June 3, 2003
    Publication date: December 9, 2004
    Inventors: Eric Williams Beach, Rajneesh Jaiswal