Abstract: Provided herein are solutions to automated material handling comprising systems that allow automated “each pick handling” without requiring the complexity of robotic grasping. Numerous examples of pre-configurable and reconfigurable transport containers, partitioning devices, and automated container configuration stations are described in addition to methods of use and associated material handling systems that utilize such containers. Further described are containers that are individually configured or customized according to specific lot sizes to more efficiently and optimally contain, store and distribute articles as a component of a picking system. Configurable containers or “totes” may be customized on a per-order basis to create optimally configured containers that maximize the use of space in a container, on a single-item-per-space basis, regardless of item quantity, size or volume, by customizing the size of each space within a container or tote.

Abstract: A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.

Abstract: Provided herein are solutions to automated material handling comprising systems that allow automated “each pick handling” without requiring the complexity of robotic grasping. Numerous examples of pre-configurable and reconfigurable transport containers, partitioning devices, and automated container configuration stations are described in addition to methods of use and associated material handling systems that utilize such containers. Further described are containers that are individually configured or customized according to specific lot sizes to more efficiently and optimally contain, store and distribute articles as a component of a picking system. Configurable containers or “totes” may be customized on a per-order basis to create optimally configured containers that maximize the use of space in a container, on a single-item-per-space basis, regardless of item quantity, size or volume, by customizing the size of each space within a container or tote.

Abstract: A modular cluster tool is disclosed. According to one embodiment, a system, comprises a wafer transfer station that includes a first vacuum chamber that stores a plurality of semiconductor wafers. The system also includes an equipment front end module interface, and two or more shuttle lock interfaces.