Abstract: A safety device for a moving system with a drive in which a pneumatically operated piston, by linear movement in a cylinder, moves a transported object past a stationary part in at least one direction has the aim of generating a switching signal at every point of a through-opening when an obstacle is located between the moving object and the edge of the through-opening, regardless of the movement direction of the object and the geometrical construction of the through-opening. The cylinder has, at its ends, devices for measuring the pressure of the air flowing out of the cylinder in the movement direction of the piston, wherein a drop in the otherwise substantially constant pressure below a threshold value serves as a switching signal at least for switching off the system. The device is useful for safety purposes during the transport of objects, particularly when the objects form shearing edges with neighboring objects.

Abstract: A safety device for a moving system with a drive in which a pneumatically operated piston, by linear movement in a cylinder, moves a transported object past a stationary part in at least one direction has the aim of generating a switching signal at every point of a through-opening when an obstacle is located between the moving object and the edge of the through-opening, regardless of the movement direction of the object and the geometrical construction of the through-opening. The cylinder has, at its ends, devices for measuring the pressure of the air flowing out of the cylinder in the movement direction of the piston, wherein a drop in the otherwise substantially constant pressure below a threshold value serves as a switching signal at least for switching off the system. The device is useful for safety purposes during the transport of objects, particularly when the objects form shearing edges with neighboring objects.

Abstract: The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.

Abstract: In order to transfer a magazine from a depositing position to a processing station, a linear drive for a rigid gripper arm is attached to a supporting column, an air passage opening being formed by the space between the supporting column and an elevator drive, this linear drive being vertically adjustable in the movement direction of the elevator. The range of action of the gripper arm is located above the magazine in the depositing position and is directed vertically to the movement direction of the elevator. All drive parts are separated from the clean room by a dust-tight enclosure and suction devices are arranged adjacent to openings through which the transport elements project into the clean room.