Abstract: A method of manufacturing a coated workpiece utilizes a target made of an alloy which is substantially a one phase. Coating is achieved by cathodic arc evaporation of the target in an oxygen atmosphere.

Abstract: A method of manufacturing a coated workpiece utilizes a target made of an alloy which is substantially a one phase. Coating is achieved by cathodic arc evaporation of the target in an oxygen atmosphere.

Abstract: A process and apparatus for coating at least one workpiece utilizes a target made of an alloy which is substantially a one phase. Coating is achieved by cathodic arc evaporation of the target in an oxygen atmosphere.

Abstract: The invention concerns an apparatus for the plasma assisted physical vapor deposition of coatings onto workpieces and a cathode spot arc evaporator and the form of integration of the evaporator in the coating apparatus.

Abstract: A process provides for the reactive treatment of workpieces in which a plasma beam is produced in an evacuated recipient. With respect to the area of the highest plasma density along the beam axis, workpieces are arranged in a radially offset manner. Fresh reactive gas is charged into the recipient and used-up gas is sucked out of the recipient. A vacuum treatment system comprises a plasma beam production arrangement, a gas inlet operatively connected with a reactive gas supply, an axially extending workpiece carrier arrangement radially set off from an axis of a plasma beam produced by the plasma beam production arrangement. The workpiece carrier arrangement mounts a rotational surface coaxial with respect to the axis of the plasma beam and a gas suction system. The process and system are used to deposit metastable layers, including cBN-layers, .alpha.-Al.sub.2 O.sub.3 layers, C.sub.3 N.sub.

Abstract: In order to improve the wear resistancy--including adherence behaviour, ductility and shearing strength--at a diamond coated multiphase body, an element enrichment is applied in controlled manner in the interphase of base body and diamond layer.

Abstract: The present invention relates to a novel method for the plasma assisted high vacuum vapor coating of parts with wear resistant coatings where the method comprises at least the process steps heating and conditioning and where the process step conditioning comprises heating. A protective gas is used for the heating. It is circulated at a pressure of at least 0.01 bar. Significant advantages are realized over state of the art methods using radiation heating. The method is preferentially carried out in an apparatus conceived for it, which comprises a blower (3), protective shields (8) and gas flow management sheets(9).

Abstract: A tool with at least one area which is to be exposed to wear, is coated in a vacuum process with a first hard coating lying directly on the tool material and a superimposed exterior friction reducing layer over the hard coating. The grain size of the hard and friction reducing layers has a linear average width of less than 1 .mu.m.

Abstract: The present invention relates to a novel method for the plasma assisted high vacuum vapor coating of parts with wear resistant coatings where the method comprises at least the process steps heating and conditioning and where the process step conditioning comprises heating. A protective gas is used for the heating. It is circulated at a pressure of at least 0.01 bar. Significant advantages are realized over state of the art methods using radiation heating. The method is preferentially carried out in an apparatus conceived for it, which comprises a blower (3), protective shields (8) and gas flow management sheets(9).

Abstract: A process provides for the reactive treatment of workpieces in which a plasma beam is produced in an evacuated recipient. With respect to the area of the highest plasma density along the beam axis, workpieces are arranged in a radially offset manner. Fresh reactive gas is charged into the recipient and used-up gas is sucked out of the recipient. A vacuum treatment system comprises a plasma beam production arrangement, a gas inlet operatively connected with a reactive gas supply, an axially extending workpiece carrier arrangement radially set off from an axis of a plasma beam produced by the plasma beam production arrangement. The workpiece carrier arrangement mounts a rotational surface coaxial with respect to the axis of the plasma beam and a gas suction system. The process and system are used to deposit metastable layers, including cBN-layers, .alpha.-Al.sub.2 O.sub.3 layers, C.sub.3 N.sub.

Abstract: A tool with at least one area which is to be exposed to wear, is coated in a vacuum process with a first hard coating lying directly on the tool material and a superimposed exterior friction reducing layer over the hard coating. The grain size of the hard and friction reducing layers has a linear average width of less than 1 .mu.m.

Abstract: It is suggested for depositing layers of mechanically resistant material, in particular on highly stressed tools, to coat the workpieces (7) alternatingly by means of reactive cathode sputtering (1, 13) and to after-treat them by means of a further plasma discharge (3).

Abstract: The invention relates to a method for depositing a diamond coating on a workpiece, for instance a drawing die or a tool punch, whereby a reactive plasma supported coating method is used. According to the invention the generation of the plasma is made by a direct current discharge, whereby additionally a flow of charged particles is fed into the discharge gap; according to the invention the workpiece to be coated is positioned in the discharge gap. Due to the inventive design a relatively long discharge gap can be used, such that also large surface areas can be coated; the coating is made at a location of the highest homogeneity and density of the plasma. By means of the invention a method is provided which can be controlled regarding financial expenses and in a reliable manner and which is suitable for large surface area coating.

Abstract: A method and apparatus for a reactive treatment of the surface of a workpiece, in which a process gas is brought into a chamber and a direct voltage arc discharge is generated in the chamber, the arc discharge is assisted or maintained, respectively by a coupling in of a flow of charged particles. In known treatment methods plasma generated in the direct voltage arc are generally distributed inhomogeneously in the inner space of the chamber and the area with a density of the plasma which is sufficient for the reactive surface treatment is relatively small. According to the invention this problem is solved in that the distribution of the effect of the treatment of the plasma in the chamber at least along a predetermined plane is set, and specifically by a setting of an areal distribution of the process gas inlet and/or setting of an areal distribution of the arc discharges in the chamber, in that the flow of charged particles is coupled into the chamber via a plurality of distribution openings.

Abstract: The hard coating includes mainly (Al,Cr).sub.2 0.sub.3 mixed crystals and a chrome content higher than 5 at %. The coating is deposited at a temperature lower than 900.degree. C., preferably lower than 500.degree. C. The hard coating is deposited by a CVD or PVD process.

Abstract: In a vacuum coating apparatus with a rotary-driven substrate carrier, the bearing of the substrate carrier is implemented as a quasi-hydrostatic rotary transmission feedthrough. For receiving the parts to be coated, a mounting is provided which is operationally connected to a drive shaft. The drive shaft has a bearing disk. In operation this bearing disk is hydrostatically supported wherein the bearing can take place on both sides of the bearing disk via at least one annular channel for each side. The drive shaft is carried radially in the wall of the apparatus and the annular channels are disposed in a spring-supported housing. The bearing disk, in turn, is provided with radial channels which are operationally connected with axial channels of the shaft portion of the drive shaft. In this way the bearing of rotary-driven substrate carriers in the vacuum coating apparatus is solved.

Abstract: A method and apparatus for controlling a ratio .gamma.=x/y, for the coating of a work piece with a layer F.sub.x G.sub.y, using plasma-enhanced reactive deposition processes, includes changing the rate at which a solid material is vaporized and also controlling the atmosphere within the vacuum chamber of the apparatus.

Abstract: An apparatus for a reactive treatment of the surface of a workpiece, in which a process gas is brought into a chamber and a direct voltage arc discharge is generated in the chamber, the arc discharge is assisted or maintained, respectively by introducing a flow of charged particles. In known treatment methods, plasma generated in the direct voltage arc are generally distributed non-homogeneously in the inner space of the chamber and the area with a density of the plasma which is sufficient for the reactive surface treatment is relatively small. According to the invention this problem is solved in that the distribution of the effect of the treatment of the plasma in the chamber at least along a predetermined plane is set, and specifically by a distribution of openings for the process gas over a given area and/or by a distribution of the arc discharges in the chamber over a given area. The flow of charged particles enters into the chamber via a plurality of distribution openings.

Abstract: The hard coating includes mainly (Al,Cr).sub.2 O.sub.3 crystals and a chrome content higher than 5 at % wherein the (Al, Cr).sub.2 O.sub.3 is a single crystal. The coating is deposited at a temperature lower than 90.degree. C., preferably lower than 500.degree. C. The hard coating is deposited by a CVD or PVD process.

Abstract: A coated tool or instrument has a wear-resistant hard coating (7) which is preferably titanium nitride for working organic material which is disposed on a separating layer (9) applied on a basic body (3). The separating layer (9) comprises a ceramic electrically non-conducting material. Such a material is preferably an oxide, nitride or oxynitride of silicon. The separating layer (9) protects the basic body (3) of the tool or instrument of e.g. a non-corrosion resistant steel. During the coating of the basic body (3) with the ceramic material, a pulsating dc voltage is applied to the basic body (3) or its holders. The pulse height is changed during the vapor deposition from high negative values to low negative values.