Patents by Inventor Erich Merz

Erich Merz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6307688
    Abstract: An optical system, in particular for projection-illumination units used in microlithography, in particular with a slot-shaped field of view or non-rotationally symmetrical illumination, has an optical element 1, in particular a lens or a mirror, which is arranged in a mount 7 or an inner ring 2, and actuators 8a, 8b and 9a, 9b. A plurality of actuators 8a, 8b and 9a, 9b act on the deformable inner ring 2 via a radial force-displacement transmission 12, 13 in order to generate tensile and/or compressive forces.
    Type: Grant
    Filed: November 22, 1999
    Date of Patent: October 23, 2001
    Assignee: Carl-Zeiss-Stiftung
    Inventors: Erich Merz, Jochen Becker
  • Patent number: 6191898
    Abstract: An optical imaging device, particularly an objective, is provided with at least one optical element, which is mounted in an inner ring, the inner ring being connected to an outer mount. A manipulator device serves for the displacement of the optical element in at least one direction that is perpendicular to the optical axis. By a system of peripheral slots between the inner ring and the outer mount with connecting members situated therebetween, a rotary joint between the inner ring and the outer mount, and at least one displacing rotary joint with an adjusting member between the inner ring and the outer mount as the manipulator device, a displacement of the optical element is attained with low deformation or controlled deformation of the optical element. The inner ring and the outer mount are preferably constituted monolithically.
    Type: Grant
    Filed: January 14, 2000
    Date of Patent: February 20, 2001
    Assignee: Carl-Zeiss-Stiftung
    Inventors: Michael Trunz, Ralf Hilgers, Erich Merz, Michael Mühlbeyer