Abstract: In a device for automatically determining the deviation between the structures of a pattern and those of a reference object, the structures to be compared are imaged, in a superposed condition, on a measurement gap, a polarization characteristic being imparted to the individual image channels. By relative movement between the superposed object image and the measurement gap and the subsequent separation of the image channels in dependence upon their polarization characteristic, photometric signal curves are obtained, from which errors in the superposition of the structures are quantitatively determined. A measurement in two coordinate directions is possible by insertion of an image-rotating prism. In an observation beam path which is branched off, the polarization characteristic is converted into a color characteristic, so that an additional double-image presentation of the structure superposition is produced.

Abstract: In a method and an arrangement for aligning, examining and/or measuring two-dimensional objects situated on a table of a measuring machine, which table is displaceable at least in two coordinate directions extending perpendicular to one another, light fluxes which are distinguishable according to the associated coordinate direction and which are combined in a beam path and which are imaged in a common intermediate image plane and which are deflected by an optical element according to the coordinate directions associated with them are projected by an imaging system onto the object to be measured in each instance. For the illumination of the respective object structures, an illuminating beam is generated for each coordinate direction, and the object structures illuminated by means of this beam are imaged, separately according to coordinate directions, on scanning means.

Abstract: A mount on the probe head of a coordinate measuring machine is described. For rapid change of a probe pin carrier, accommodating at least one probe pin, which is drawn against a bearing which clearly determines the position of the probe pin carrier in the probe head, a mechanical clamp mechanism, which acts on the bearing part of the probe pin carrier, and compression-creating and tension-creating media, actuating the clamp mechanism, are provided in the probe head.

Abstract: Apparatus for sensing test values at test samples which uses an elastically supported mechanical sensor (3) moving relative to test samples (4) and at least one test value transmitter (11) with counter (9) detecting the relative motion between the sensor (3) and the test samples. At the instant of impact between sensor (3) and the test samples (4), a signal is generated which is used to store the test value present at the test value transmitter (11) at the instant of impact between the sensor (3) and the test samples (4) into a memory (13a,13b). The sensor consists of one part (2') which is fixed to the housing and other part (2") which is movable with respect to the fixed one. An oscillation or acceleration pickup (10) is mounted externally to the moving part (3) and generates the signal required to store the test value.A circuit (14) is provided to the oscillation or acceleration pickup (10) to distinguish between actual sensing signals and spurious ones.

Abstract: Instrumentation for sensing the test values at test samples, using a mechanical sensor moving relative to the test sample and consisting of a housing fixed part and of a movable, articulating multi ball and socket part connected to the housing fixed part and at least one test value transmitter. A trigger signal is generated in the instrumentation at the instant of impact between sensor and test sample and is stored to record the test value present at the time of impact at the test value transmitter.At least one force or acceleration pickup (12,23,24,30) is provided which is mounted on the housing fixed part (2) of the sensor (5) and delivers the trigger signal.

Abstract: Disclosed is a linear micrometer which comprises a cylindrically shaped housing, a tube-shaped sleeve displaceably mounted along the longitudinal axis of the housing and extending from one end of the housing, a measurement scale fixedly mounted along the longitudinal axis of the housing and slidingly supported inside the spindle sleeve, and a measurement readout means couple to the spindle sleeve for reading and displaying the relative position of the spindle sleeve to the scale. A rapid adjusting means and fine adjusting means are also provided.

Abstract: Disclosed is a two-coordinate measuring device for use in the measuring ocular of a microscopic measuring instrument, comprising at least one reference mark carrier movably mounted in an intermediate image plane of the instrument and having a direction of movement which forms an angle of 45.degree. with axes in the x- and y-direction defined by the object, and means mounted in the measuring ocular for adjusting the position of the mark carrier in order to align the reference mark with the dimensions of an object which is to be measured. The reference mark of the carrier preferably comprises two perpendicular lines which are arranged on the carrier such that the bisector of the angle formed by the lines coincides with the direction of movement of the carrier. Also disclosed is a process for use of this device.

Abstract: A sensor for calipering workpieces having one spring parallelogram for Apr. motion in each coordinate axis wherein additional spring means vary the spring constant in at least one of the spring parallelograms. The spring means include two coil springs acting in opposition to one another having between the opposed ends intermediate spring bolts, ball stops between the heads of the bolts and a bending rod with a ball at the end thereof acting on the heads of the bolts to compress the coil springs while being held without play by the ball stops.