Patents by Inventor Erich Tzou

Erich Tzou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High pressure/high temperature process chamber
    Patent number: 5990453
    Abstract: An improved processing chamber is provided that withstands numerous high pressure/high temperature processing cycles without heater breakage. The processing chamber contains a high conductivity, a high emissivity and/or a high transmissivity shield positioned in sufficient proximity to a heater to prohibit gas currents such as convection current loops from forming between the shield and the heater. The shield is preferably a thin anodized metal or a sapphire sheet.
    Type: Grant
    Filed: December 2, 1997
    Date of Patent: November 23, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Ashok K. Das, Joe Stevens, Erich Tzou, Matt Tsai