Patents by Inventor Ericka M. Ramirez

Ericka M. Ramirez has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pedestal for flat panel display applications
    Patent number: 6924462
    Abstract: An apparatus for supporting a substrate in a processing system comprising a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon.
    Type: Grant
    Filed: March 4, 2003
    Date of Patent: August 2, 2005
    Assignee: Applied Materials, Inc.
    Inventors: William A. Bagley, Ericka M. Ramirez, Stephen C. Wolgast
  • Pre-heating and loadlock pedestal material for high temperature CVD liquid crystal and flat panel display applications
    Publication number: 20030164362
    Abstract: A method and apparatus for supporting a substrate during a thermal process. In one embodiment, a substrate support is provided having a body and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a substrate supported thereon.
    Type: Application
    Filed: March 4, 2003
    Publication date: September 4, 2003
    Applicant: Applied Materials, Inc.
    Inventors: William A. Bagley, Ericka M. Ramirez, Stephen C. Wolgast
  • Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications
    Patent number: 6528767
    Abstract: An apparatus for supporting a glass substrate is provided. In one embodiment, a substrate support is provided having a base structural member and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a glass substrate supported thereon. The substrate supports may be utilized in various chambers such as load locks chamber and chambers having thermal processes.
    Type: Grant
    Filed: September 24, 2001
    Date of Patent: March 4, 2003
    Assignee: Applied Materials, Inc.
    Inventors: William A. Bagley, Ericka M. Ramirez, Stephen C. Wolgast
  • PRE-HEATING AND LOAD LOCK PEDESTAL MATERIAL FOR HIGH TEMPERATURE CVD LIQUID CRYSTAL AND FLAT PANEL DISPLAY APPLICATIONS
    Publication number: 20020175160
    Abstract: An apparatus for supporting a glass substrate is provided. In one embodiment, a substrate support is provided having a base structural member and an upper top portion having a surface thereon adapted to minimize friction and/or chemical reactions between the substrate support and a glass substrate supported thereon. The substrate supports may be utilized in various chambers such as load locks chamber and chambers having thermal processes.
    Type: Application
    Filed: September 24, 2001
    Publication date: November 28, 2002
    Applicant: Applied Materials, Inc.
    Inventors: William A. Bagley, Ericka M. Ramirez, Stephen C. Wolgast