Patents by Inventor Erik Jan Hilda Collart

Erik Jan Hilda Collart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion beam generation apparatus
    Patent number: 6559454
    Abstract: An ion beam generation apparatus comprising an ion source (20) for generating ions, and a tetrode extraction assembly (11) comprising four electrodes for extracting and accelerating ions from the ion source. The extraction assembly comprises a source electrode (22) at the potential of the ion source, an extraction electrode (23) adjacent to the source electrode to extract ions from the ion source (20), a ground electrode (25), and a suppression electrode (24) between the extraction electrode and the ground electrode. Each electrode has an aperture to allow the ion beam to pass therethrough. The gap between the extraction (23) and suppression (24) electrodes is variable in the direction of ion beam travel.
    Type: Grant
    Filed: May 29, 2001
    Date of Patent: May 6, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Adrian John Murrell, Erik Jan Hilda Collart, Bernard Francis Harrison, Amir Al-Bayati, Chris James Burgess, David Armour, Andrew Holmes, Simon Povall, Drew Arnold, Paul Anthony Burfield