Patents by Inventor Erik Johannes NIEUWENHUIS

Erik Johannes NIEUWENHUIS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OBJECT HOLDER, TOOL AND METHOD OF MANUFACTURING AN OBJECT HOLDER
    Publication number: 20230105002
    Abstract: An object holder configured to support an object, the object holder including: a core body comprising a plurality of burls having distal ends in a support plane for supporting the object; and an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers, wherein the electrostatic sheet is bonded to the core body by a bonding material having a thickness of at least 100 nm.
    Type: Application
    Filed: February 25, 2021
    Publication date: April 6, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Bastiaan Lambertus Wilhelmus Marinus VAN DE VEN, Johannes Bernardus Charles ENGELEN, Arnoud Willem NOTENBOOM, Jim Vincent OVERKAMP, Kjeld Gertrudus Hendrikus JANSSEN, Johannes Adrianus Cornelis Maria PIJNENBURG, Jeroen VAN DUIVENBODE, Erik Johannes NIEUWENHUIS, Koos VAN BERKEL