Patents by Inventor Erik Maiken

Erik Maiken has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of inferring optical parameters outside of a measurement spectral range
    Patent number: 6710865
    Abstract: The present invention provides a method for inferring optical parameters of a sample in a predictive spectral range by use of the known values of the optical parameters in a predetermined measurement spectral range. The method of the present invention capitalizes on the Forouhi-Bloomer dispersion equations for the optical constants n and k.
    Type: Grant
    Filed: September 14, 2001
    Date of Patent: March 23, 2004
    Assignee: N&K Technology, Inc.
    Inventors: Abdul Rahim Forouhi, Dale A. Harrison, Erik Maiken, John C. Lam
  • Method of monitoring thin-film processes and metrology tool thereof
    Publication number: 20030053081
    Abstract: The present invention provides a method for monitoring a modifying-process taking place in a thin-film sample and thereby characterizing the sample thus modified, wherein the modifying-process is performed for purpose of improving physical properties of the sample. The present invention further provides a monitoring tool for characterizing various thin-film processes. Advantages of the method of the present invention are manifest in its non-intrusive nature, fast (or real-time) response, robust sensitivity, and versatility in a variety of thin-film processes. Another inherent advantage of the present invention is that an assortment of the “n&k” parameters can be obtained by using only measurement tool, in contrast to two (or more) simultaneous measurement tools used in the prior art.
    Type: Application
    Filed: July 12, 2001
    Publication date: March 20, 2003
    Inventors: Abdul Rahim Forouhi, Dale A. Harrison, Erik Maiken, John C. Lam
  • Method of inferring optical parameters outside of a measurement spectral range
    Publication number: 20020113957
    Abstract: The present invention provides a method for inferring optical parameters of a sample in a predictive spectral range by use of the known values of the optical parameters in a predetermined measurement spectral range. The method of the present invention capitalizes on the Forouhi-Bloomer dispersion equations for the optical constants n and k.
    Type: Application
    Filed: September 14, 2001
    Publication date: August 22, 2002
    Inventors: Abdul Rahim Forouhi, Dale A. Harrison, Erik Maiken, John C. Lam