Patents by Inventor Erik Maria Rekkers
Erik Maria Rekkers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11131937Abstract: A positioning device configured to displace an object is disclosed. The positioning device comprises a stage to support the object, an actuator to move the stage with respect to a reference in a direction of movement, a balance mass arranged between the actuator and the reference to reduce transfer of reaction forces from the actuator to the reference, a support device arranged between the reference and the balance mass to support the balance mass, and a gravity compensator acting between the reference and the balance mass to exert a lifting force on the balance mass to reduce a gravitational support force to be provided by the support device to support the balance mass.Type: GrantFiled: December 20, 2019Date of Patent: September 28, 2021Assignee: ASML Netherlands B.V.Inventors: Michaël Johannes Christiaan Ronde, Johannes Hubertus Antonius Van De Rijdt, Maarten Frans Janus Kremers, Erik Maria Rekkers
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Publication number: 20200201196Abstract: A positioning device configured to displace an object is disclosed. The positioning device comprises a stage to support the object, an actuator to move the stage with respect to a reference in a direction of movement, a balance mass arranged between the actuator and the reference to reduce transfer of reaction forces from the actuator to the reference, a support device arranged between the reference and the balance mass to support the balance mass, and a gravity compensator acting between the reference and the balance mass to exert a lifting force on the balance mass to reduce a gravitational support force to be provided by the support device to support the balance mass.Type: ApplicationFiled: December 20, 2019Publication date: June 25, 2020Inventors: Michaël Johannes Christiaan RONDE, Johannes Hubertus Antonius VAN DE RIJDT, Maarten Frans Janus KREMERS, Erik Maria REKKERS
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Patent number: 9927711Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets (370). A moving part includes a permanent magnet (362) with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. A ferromagnetic shield (820) is provided around the moving part and has at least one interruption (822) to reduce the influence of adjacent actuators or stray fields while also minimizing attraction between the permanent magnet (362) and the shield (820).Type: GrantFiled: December 2, 2014Date of Patent: March 27, 2018Assignee: ASML Netherlands B.V.Inventors: Sven Antoin Johan Hol, Andrea Lodovico Mancuso, Hendricus Johannes Maria Meijer, Erik Maria Rekkers, Marinus Johannes Maria Van Dam
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Patent number: 9785051Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.Type: GrantFiled: September 17, 2013Date of Patent: October 10, 2017Assignee: ASML NETHERLANDS B.V.Inventors: Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Edwin Johan Buis, Erik Maria Rekkers, Gosse Charles De Vries, Hako Botma, Marinus Johannes Maria Van Dam, Ramon Pascal Van Gorkom
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Patent number: 9494878Abstract: An EUV optical apparatus includes a number of adjustable mirrors (22x) on mirror bodies (120). Each mirror body is supported on an actuator (100x) comprising a moving part (132, 134, 136) and a fixed casing part (128, 130). The actuator provides a resilient support (140, 142) for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (166, 170-178) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling (102, 104a, 104b) is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.Type: GrantFiled: September 17, 2013Date of Patent: November 15, 2016Assignee: ASML Netherlands B.V.Inventors: Edwin Johan Buis, Gosse Charles De Vries, Sven Antoin Johan Hol, Erik Maria Rekkers
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Publication number: 20160313649Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets (370). A moving part includes a permanent magnet (362) with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. A ferromagnetic shield (820) is provided around the moving part and has at least one interruption (822) to reduce the influence of adjacent actuators or stray fields whilst also minimizing attraction between the permanent magnet (362) and the shield (820).Type: ApplicationFiled: December 2, 2014Publication date: October 27, 2016Applicant: ASML, Netherlands B.V.Inventors: Sven Antoin Johan HOL, Andrea Lodovico MANCUSO, Hendricus Johnnes, Maria MEIJER, Erik Maria REKKERS, Marinus Johannes Maria VAN DAM
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Publication number: 20150277233Abstract: An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.Type: ApplicationFiled: September 17, 2013Publication date: October 1, 2015Inventors: Jan Bernard Plechelmus Van Schoot, Sven Antoin Johan Hol, Edwin Johan Buis, Erik Maria Rekkers, Gosse Charles De Vries, Hako Botma, Marinus Johannes Maria Van Dam, Ramon Pascal Van Gorkom
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Publication number: 20150261093Abstract: An EUV optical apparatus includes a number of adjustable mirrors (22x) on mirror bodies (120). Each mirror body is supported on an actuator (100x) comprising a moving part (132, 134, 136) and a fixed casing part (128, 130). The actuator provides a resilient support (140, 142) for the mirror body so that it is tiltable with two degrees relative to the casing. An electromagnetic motor (166, 170-178) applies first part, under the influence of an applied motive force, the resilient mounting being arranged to provide a biasing force that resists said motive force. A magnetic coupling (102, 104a, 104b) is arranged between the moving and fixed parts so as to provide a counter-biasing force. The counter-biasing force partly opposes said biasing force and thereby reduces the motive force required to effect a given displacement. The actuator can thus be made with reduced size, weight and heat dissipation.Type: ApplicationFiled: September 17, 2013Publication date: September 17, 2015Applicant: ASML Netherlands B.V.Inventors: Edwin Johan Buis, Gosse Charles De Vries, Sven Antoin Johan Hol, Erik Maria Rekkers
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Patent number: 7307688Abstract: A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate. The apparatus includes an optical element, and at least two clamping assemblies for clamping the optical element. The clamping assemblies each include a first clamp with a first clamping surface in contact with a first surface of the optical element and a second clamp with a second clamping surface in contact with a second surface of said optical element, opposite said first surface of said optical element.Type: GrantFiled: November 19, 2004Date of Patent: December 11, 2007Assignee: ASML Netherlands B.V.Inventors: Cornelis Christiaan Ottens, Erik Maria Rekkers
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Patent number: 7307689Abstract: A lithographic apparatus includes a guiding mechanism to guide a movable structure such as a mask blade of a reticle masking device, a movable part connected to the movable structure, and a substantially stationary part to guide the movable part. The movable part includes a nozzle to inject a gas in a gap between the movable and stationary parts, a contactless supply of the gas from the stationary part to the movable part being provided by a gas supply outlet in the stationary part and a gas supply inlet in the movable part. The gas supply outlet includes an inlet trench in a surface of the movable part facing the gas supply outlet of the stationary part, the trench being orientated parallel to a direction of movement of the movable part. The movable part includes a motor drive part and a counter weight part connected to an end of the motor drive part facing away from the movable structure.Type: GrantFiled: December 29, 2004Date of Patent: December 11, 2007Assignee: ASML Netherlands B.V.Inventors: Maurice Philippe Du Mee, Edwin Johan Buis, Johannes Adrianus Antonius Theodorus Dams, Johannes Andreas Henricus Maria Jacobs, Antoine Hendrik Verweij, Erik Maria Rekkers