Patents by Inventor Erik Martijn Greijdanus

Erik Martijn Greijdanus has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 7872731
    Abstract: A lithographic apparatus includes a polarization changing element including at least two wedge-shaped optically active members configured to rotate the polarization direction of at least a portion of the radiation beam with a predetermined angle with respect to the first direction and an optical propagation length adaptor associated with the wedge-shaped optically active members to adjust the predetermined angle.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: January 18, 2011
    Assignee: ASML Netherlands B.V.
    Inventors: Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Heine Melle Mulder, Erik Martijn Greijdanus
  • Lithographic apparatus and device manufacturing method
    Publication number: 20080259300
    Abstract: A lithographic apparatus includes a polarization changing element including at least two wedge-shaped optically active members configured to rotate the polarization direction of at least a portion of the radiation beam with a predetermined angle with respect to the first direction and an optical propagation length adaptor associated with the wedge-shaped optically active members to adjust the predetermined angle.
    Type: Application
    Filed: April 20, 2007
    Publication date: October 23, 2008
    Applicant: ASML Netherlands B.V.
    Inventors: Michel Fransois Hubert Klaassen, Hendrikus Robertus Marie Van Greevenbroek, Heine Melle Mulder, Erik Martijn Greijdanus