Patents by Inventor Erik Schoemaker

Erik Schoemaker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method of monitoring and diagnosing system condition and performance
    Publication number: 20070002295
    Abstract: The invention is directed to a system and method of monitoring and/or diagnosing tool performance in real-time for system degradation. The invention issues alerts and provides a structured process for identifying the source of the problem and enabling action to be taken before defects are detected on the final product. The invention provides a hierarchical data structure including elements that are monitored based on key performance indicators and diagnostic data sets.
    Type: Application
    Filed: June 30, 2005
    Publication date: January 4, 2007
    Applicant: ASML Netherlands B.V.
    Inventors: Maria Reuhman-Huisken, Leon Levasier, Tasja Van Rhee, Rosaria Salpietro, Erik Schoemaker, Eric Jacqmin, Martin Prins, Marcel Nicolaas Van Kervinck, Timotheus Bootsma