Patents by Inventor Erik Syangywan Jeng

Erik Syangywan Jeng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5688713
    Abstract: A method for manufacturing an array of double-crown-shaped storage capacitors with increased capacitance on a dynamic random access memory (DRAM) device has been achieved. The invention utilizes a polysilicon and silicon nitride spacer to form the double-crown capacitors while forming concurrently bit lines and node contacts for the bottom electrodes of the storage capacitors. A silicon nitride layer and a silicon nitride spacer are used to insulate the bit lines from the capacitors formed thereon. The polysilicon sidewall spacer is used to pattern a very narrow vertical insulating structure on which is formed the polysilicon double crown by depositing another polysilicon layer which is etched back. The vertical insulating structures are removed by selective etching leaving a free-standing bottom electrode having a double-crown-shaped structure. An interelectrode dielectric layer having a high dielectric constant, and a final polysilicon layer are deposited to complete the storage capacitors for the DRAM.
    Type: Grant
    Filed: August 26, 1996
    Date of Patent: November 18, 1997
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Kung Linliu, Erik Syangywan Jeng, Tzu-Shih Yen