Patents by Inventor Erik Vervoort

Erik Vervoort has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 9885964
    Abstract: A lithographic apparatus includes a substrate table constructed to hold a substrate; a compartment configured to receive the substrate table; a thermal conditioning unit arranged to receive a substrate to be exposed and thermally condition the substrate; and a transfer system for transferring a thermally conditioned substrate to the substrate table, wherein the substrate table and the thermal conditioning unit are arranged inside the compartment of the lithographic apparatus, at least during a transfer of the thermally conditioned substrate from the thermal conditioning unit to the substrate table.
    Type: Grant
    Filed: October 24, 2012
    Date of Patent: February 6, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Jan Steven Christiaan Westerlaken, Rob Jansen, Erik Vervoort
  • LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    Publication number: 20130107236
    Abstract: A lithographic apparatus includes a substrate table constructed to hold a substrate; a compartment configured to receive the substrate table; a thermal conditioning unit arranged to receive a substrate to be exposed and thermally condition the substrate; and a transfer system for transferring a thermally conditioned substrate to the substrate table, wherein the substrate table and the thermal conditioning unit are arranged inside the compartment of the lithographic apparatus, at least during a transfer of the thermally conditioned substrate from the thermal conditioning unit to the substrate table.
    Type: Application
    Filed: October 24, 2012
    Publication date: May 2, 2013
    Applicant: ASML Netherlands B.V.
    Inventors: Jan Steven Christiaan WESTERLAKEN, Rob Jansen, Erik Vervoort