Abstract: A method of thermally coupling a flow tube or like component to a thermal sensor comprises bonding the component to the thermal sensor such that thermally conductive portions formed on the component are thermally coupled to corresponding sensing/heating elements disposed on the thermal sensor. The method can be employed to form a capillary mass flow sensor system. Thermally conductive portions, such as metal bands, can be formed on the outer surface of a capillary tube for bonding with corresponding resistive heat sensing and heating elements disposed on the substrate of a micro mass flow sensor. Bonding metal pads can be formed on the sensor surface preparatory to solder bonding the tube metal bands to the resistive sensing and heating elements.

Abstract: A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.

Abstract: A medium having microfluidic circuitry for sampling and analyses. The medium may be a cartridge having a window countersunk into it and containing a flow channel. The flow channel may have items of interest flowing through it. Analyses of these items may be optical involving one or more light sources emanating light to and one or more light detectors receiving light from the channel. There are various configurations so that source and detector light cones may reach the flow channel without obscuration or interference of the light to and from the flow channel in the window.

Abstract: A method of thermally coupling a flow tube or like component to a thermal sensor comprises bonding the component to the thermal sensor such that thermally conductive portions formed on the component are thermally coupled to corresponding sensing/heating elements disposed on the thermal sensor. The method can be employed to form a capillary mass flow sensor system. Thermally conductive portions, such as metal bands, can be formed on the outer surface of a capillary tube for bonding with corresponding resistive heat sensing and heating elements disposed on the substrate of a micro mass flow sensor. Bonding metal pads can be formed on the sensor surface preparatory to solder bonding the tube metal bands to the resistive sensing and heating elements.

Abstract: A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.

Abstract: A medium having microfluidic circuitry for sampling and analyses. The medium may be a cartridge having a window countersunk into it and containing a flow channel. The flow channel may have items of interest flowing through it. Analyses of these items may be optical involving one or more light sources emanating light to and one or more light detectors receiving light from the channel. There are various configurations so that source and detector light cones may reach the flow channel without obscuration or interference of the light to and from the flow channel in the window.

Abstract: A sensor can be configured to generally include a flow channel block having a flow channel formed therein, and a sensor chip for sensing fluid flow, wherein a fluid in the flow channel surrounds the sensor chip. Alternatively, the sensor chip can be fastened at one side to a substrate and on another side of the substrate to a core tube inserted into the flow channel. This core tube provides electrical insulation and corrosion protection to the sensor chip, reduces flow noise, (and by the non-intrusive nature of the measurement) essentially eliminates the risk of fluid leakage, and maintains the fluid super-clean and contamination-free while improving structural integrity for the thermal measurements derived from the sensor chip. The use of such a core tube configuration also can protect the sensor from corrosion, radioactive or bacterial contamination, overheating, or freeze-ups.

Abstract: An integratable fluid flow and property microsensor assembly is configured to be operably embedded in a microfluidic cartridge of the type used in lab-on-a-chip systems. The assembly is a robust package having a microstructure flow sensor contained within a housing in order to achieve a robust sensing device. The cartridge provides a flow path to the assembly, which directs the fluid across the flow sensor and returns the fluid to the cartridge flow path. The flow sensor monitors the controlled flow of fluid and transmits signals indicative of that flow. The assembly structure provides a robust sensor that is operable and accurate in many different applications.

Abstract: A sensor can be configured to generally include a flow channel block having a flow channel formed therein, and a sensor chip for sensing fluid flow, wherein a fluid in the flow channel surrounds the sensor chip. Alternatively, the sensor chip can be fastened at one side to a substrate and on another side of the substrate to a core tube inserted into the flow channel. This core tube provides electrical insulation and corrosion protection to the sensor chip, reduces flow noise, (and by the non-intrusive nature of the measurement) essentially eliminates the risk of fluid leakage, and maintains the fluid super-clean and contamination-free while improving structural integrity for the thermal measurements derived from the sensor chip. The use of such a core tube configuration also can protect the sensor from corrosion, radioactive or bacterial contamination, overheating, or freeze-ups.

Abstract: An integratable fluid flow and property microsensor assembly is configured to be operably embedded in a microfluidic cartridge of the type used in lab-on-a-chip systems. The assembly is a robust package having a microstructure flow sensor contained within a housing in order to achieve a robust sensing device. The cartridge provides a flow path to the assembly, which directs the fluid across the flow sensor and returns the fluid to the cartridge flow path. The flow sensor monitors the controlled flow of fluid and transmits signals indicative of that flow. The assembly structure provides a robust sensor that is operable and accurate in many different applications.

Abstract: A microscopic size absolute pressure sensor for air or gas of the thermal conductivity type, a silicon nitride covered silicon microchip has an elongated V-groove anisotropically etched in the silicon with a heated silicon nitride bridge element extending over the surface of the V-groove.

Abstract: A condition responsive sensor is provided with a flow sensor channel means that is interconnected to a capillary tube restriction. The capillary tube restriction can be readily interchanged on the device to change the response of the condition responsive sensor. A very small flow sensor is placed in the flow sensor channel. The flow sensor channel and the capillary tube restriction can be placed generally parallel to one another to reduce the overall length of the device.

Abstract: In a multi-burner boiler or industrial furnace installation that uses pulverized coal for fuel and utilizes an oil pilot torch it has been difficult to sense and discriminate satisfactorily between safe and unsafe burner operation in these multi-burner arrangements. By using both a Si detector (visible light responsive) and a lead sulfide detector (infrared responsive) and selectively combining the signals therefrom, the best characteristics of both detectors are utilized to provide satisfactory flame sensing.