Abstract: A system and method for sizing semiconductor wafer defects combines contiguous light intensity values over a defect area of the wafer to provide a defect sizing metric. The light intensity values resulting from a light source applied to the wafer are summed and the summation is compared to known metric values related to known defect sizes. The result of the comparison provides an estimate for the defect size under consideration. The combination of the light intensity values produces defect sizing estimates in saturated and unsaturated ranges of operation for the wafer inspection equipment. Calculations applied to the combined light intensity values vary depending upon whether the light intensity component is from a saturated or an unsaturated measurement. The defect sizing metric can be applied continuously in saturated and unsaturated ranges of operation to avoid additional processing steps, such as recalibration of the inspection equipment.

Abstract: A system and method for sizing semiconductor wafer defects combines contiguous light intensity values over a defect area of the wafer to provide a defect sizing metric. The light intensity values resulting from a light source applied to the wafer are summed and the summation is compared to known metric values related to known defect sizes. The result of the comparison provides an estimate for the defect size under consideration. The combination of the light intensity values produces defect sizing estimates in saturated and unsaturated ranges of operation for the wafer inspection equipment. Calculations applied to the combined light intensity values vary depending upon whether the light intensity component is from a saturated or an unsaturated measurement. The defect sizing metric can be applied continuously in saturated and unsaturated ranges of operation to avoid additional processing steps, such as recalibration of the inspection equipment.