Patents by Inventor Ernst-Dieter Knohl

Ernst-Dieter Knohl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7540983
    Abstract: In the case of a method of producing aspherical optical surfaces of optical elements (1), in particular for use in microlithography for producing semiconductor elements, the optical element (1) is ground for example in the form of a meniscus. In a first method step, the optical element (1) is introduced into a basic form (2), which has a spherical form bed and is being held at a distance over the form bed (3). After that, an intermediate medium (6) is introduced in the basic form (2) between the optical element (1) and the form bed (3) and, subsequently the optical element (1) being removed together with the intermediate medium (6) from the basic form. Then, the spherical form bed (3) of the basic form (2) or a second basic form is transformed into an aspherical form bed (3?) computationally determined in advance.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: June 2, 2009
    Assignee: Carl Zeiss SMT AG
    Inventors: Ernst-Dieter Knohl, Andreas Frommeyer, Hermann Schubert
  • Publication number: 20050018311
    Abstract: In the case of a method of producing aspherical optical surfaces of optical elements (1), in particular for use in microlithography for producing semiconductor elements, the optical element (1) is ground for example in the form of a meniscus. In a first method step, the optical element (1) is introduced into a basic form (2), which has a spherical form bed and is being held at a distance over the form bed (3). After that, an intermediate medium (6) is introduced in the basic form (2) between the optical element (1) and the form bed (3) and, subsequently the optical element (1) being removed together with the intermediate medium (6) from the basic form. Then, the spherical form bed (3) of the basic form (2) or a second basic form is transformed into an aspherical form bed (3?) computationally determined in advance.
    Type: Application
    Filed: July 8, 2004
    Publication date: January 27, 2005
    Inventors: Ernst-Dieter Knohl, Andreas Frommeyer, Hermann Schubert
  • Patent number: 4632523
    Abstract: A supporting system is disclosed for taking up the weight components of large astronomical telescopes. The weight components act in the mirror plane and load-relieving devices are arranged at the rear side of the mirror. The load-relieving devices are arranged in concentric circles and act on the outside of the rear surface of the mirror whereat supporting forces are introduced outside of the gravity plane of the mirror. Each load-relieving device applies a compensating moment to the particular portion of the mirror to which it corresponds which counteracts the disturbing moment resulting from the force of the weight of the particular portion and the supporting force.
    Type: Grant
    Filed: November 26, 1985
    Date of Patent: December 30, 1986
    Assignee: Carl-Zeiss-Stiftung
    Inventor: Ernst-Dieter Knohl