Abstract: A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrictor defines the compressed air flow to the air bearing. The machine has a first operating state, in which a high compressed air flow is defined and in which the actuator can be actuated. The machine has a second operating state, in which a compressed air flow lower than the high compressed air flow is defined. In the second operating state, the actuator is secured against actuation from a closed-loop position controller, while the closed-loop position controller is maintained in operation.

Abstract: A machine has a frame structure for moving a machine head in one or more spatial directions. The frame structure comprises an actuator and an air bearing for moving the head. The machine also comprises a compressed air feed connected to the air bearing for providing a compressed air flow. A restrictor defines the compressed air flow to the air bearing. The machine has a first operating state, in which a high compressed air flow is defined and in which the actuator can be actuated. The machine has a second operating state, in which a compressed air flow lower than the high compressed air flow is defined. In the second operating state, the actuator is secured against actuation from a closed-loop position controller, while the closed-loop position controller is maintained in operation.

Abstract: A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit.

Abstract: A machine part (12) is guided along a defined movement path (28) over a workpiece surface (23). The machine part (12) is held at a defined distance (50) from the workpiece surface (23) during this movement. For that purpose, a distance sensor (14) is provided that runs ahead of the machine part (12) with a defined lead (18). A plurality of distance values between the distance sensor (14) and the workpiece surface (23) are determined. A plurality of control values for adjusting the defined distance (50) are determined as a function of the distance values. The defined distance (50) is repeatedly adjusted by means of the control values. In accordance with one aspect of the invention, the distance values along the movement path (28) are determined by means of a first grid spacing (46). The control values are determined along the movement path (28) with a second grid spacing (44). The first and the second grid spacings (46, 44) are different.

Abstract: A machine part, such as a laser, is moved along at least one axis of movement relative to a workpiece. Position pulses are generated by means of an incremental encoder, with the number of position pulses in a position pulse train being representative of the movement position of the machine part. A trigger signal for the machine part is generated when the current number of position pulses corresponds to a predefined number of pulses. In a preferred embodiment, the current number of position pulses and the defined number of pulses are compared remote from a higher-level drive control circuit.

Abstract: A machine part is guided along a defined movement path over a workpiece surface. The machine part is held at a defined distance from the workpiece surface during this movement. For that purpose, at least one distance sensor is provided that runs ahead of the machine part with a defined lead. A plurality of distance values indicative of a distance between the distance sensor and the workpiece surface are determined along the movement path. A plurality of control values are determined as a function of the distance values. The defined distance is repeatedly adjusted by means of the control values. In accordance with a first aspect, the distance values are determined at measurement points distributed with a first grid spacing along the movement path, while the control values are determined for actuating points distributed with a second grid spacing along the movement path, the first and the second grid spacings being different.

Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.